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- [21] TUNABLE BANDPASS FILTER BASED ON ELECTROTHERMALLY AND ELECTROSTATICALLY ACTUATED MEMS ARCH RESONATOR PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2016, VOL. 10, 2017,
- [24] Fabrication and dynamic analysis of the electrostatically actuated MEMS variable capacitor Microsystem Technologies, 2008, 14 : 397 - 402
- [25] Optimising Dynamic Behaviour of Electrostatically Actuated MEMS Contact Switch EUROSIME 2009: THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICRO-ELECTRONICS AND MICRO-SYSTEMS, 2009, : 157 - 163
- [27] Nonlinear dynamic output feedback stabilization of electrostatically actuated MEMS 42ND IEEE CONFERENCE ON DECISION AND CONTROL, VOLS 1-6, PROCEEDINGS, 2003, : 61 - 66
- [28] Fabrication and dynamic analysis of the electrostatically actuated MEMS variable capacitor MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2008, 14 (03): : 397 - 402
- [30] Investigation of the internal stress effects on static and dynamic characteristics of an electrostatically actuated beam for MEMS and NEMS application Microsystem Technologies, 2011, 17 : 1779 - 1789