Challenges and opportunities in advanced Ge pMOSFETs

被引：78

作者：

Simoen, E. ^{[1
]}

Mitard, J. ^{[1
]}

Hellings, G. ^{[1
]}

Eneman, G. ^{[1
]}

De Jaeger, B. ^{[1
]}

Witters, L. ^{[1
]}

Vincent, B. ^{[1
]}

Loo, R. ^{[1
]}

Delabie, A. ^{[1
]}

Sioncke, S. ^{[1
]}

Caymax, M. ^{[1
]}

Claeys, C. ^{[1
,2
]}

机构：

[1] IMEC, B-3001 Louvain, Belgium

[2] EE Dept KU Leuven, B-3001 Louvain, Belgium

来源：

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 2012年 / 15卷 / 06期

关键词：

Germanium; CMOS; Surface passivation; High-k gate stack; Hole mobility; ATOMIC LAYER DEPOSITION; HIGH-K/GE PMOSFETS; HIGH-QUALITY GE; HIGH-MOBILITY; STRAINED-GE; HOLE-MOBILITY; SILICON-GERMANIUM; EPITAXIAL-GROWTH; SI WAFERS; P-MOSFETS;

D O I：

10.1016/j.mssp.2012.04.017

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper aims at reviewing the state-of-the art of Ge pMOSFETs for future high-performance CMOS devices. Key in the development is the integration of a Ge channel on a silicon platform and the passivation of the interface between the high-k gate stack and the substrate. The different routes will be critically discussed in view of optimizing the on-current related to a high low-field hole mobility and reducing the off-current and the short-channel effects. Finally, an outlook on future technology developments will be formulated. (C) 2012 Elsevier Ltd. All rights reserved.

引用

页码：588 / 600

页数：13

共 50 条

[21] Challenges and opportunities for doping control in Ge for micro and optoelectronics applications
Bruno, E.
Scapellato, G. G.
Napolitani, E.
Mirabella, S.
Boninelli, S.
La Magna, A.
Mastromatteo, M.
De Salvador, D.
Fortunato, G.
Privitera, V.
Priolo, F.
HIGH PURITY SILICON 12, 2012, 50 (05): : 89 - 103
[22] A Review of Advanced Electrode Materials for Supercapacitors: Challenges and Opportunities
Baig, Mutawara Mahmood
Khan, Muhammad Awais
Gul, Iftikhar Hussain
Rehman, Shafi Ur
Shahid, Muhammad
Javaid, Sana
Baig, Sherjeel Mahmood
JOURNAL OF ELECTRONIC MATERIALS, 2023, 52 (09) : 5775 - 5794
[23] Challenges and opportunities of process modelling renewable advanced fuels
Testa, Lorenzo
Chiaramonti, David
Prussi, Matteo
Bensaid, Samir
BIOMASS CONVERSION AND BIOREFINERY, 2024, 14 (07) : 8153 - 8188
[24] Challenges and Opportunities of Neoadjuvant Treatment in Locally Advanced Melanoma
McKean, Meredith A.
Amaria, Rodabe N.
AMERICAN JOURNAL OF CLINICAL DERMATOLOGY, 2018, 19 (05) : 639 - 646
[25] Challenges and Opportunities of Neoadjuvant Treatment in Locally Advanced Melanoma
Meredith A. McKean
Rodabe N. Amaria
American Journal of Clinical Dermatology, 2018, 19 : 639 - 646
[26] Advanced approaches to the international oversight of neptunium: Challenges of opportunities
Stanbro, William D.
Hsue, Sin-Tao
Burr, Thomas L.
Collins, Michael L.
Wells, Cyndi A.
Eccleston, George W.
Charlton, William S.
JNMM, Journal of the Institute of Nuclear Materials Management, 2002, 30 (02): : 60 - 64
[27] Air traffic management: Challenges and opportunities for advanced control
Lecchini-Visintini, Andrea
Lygeros, John
INTERNATIONAL JOURNAL OF ADAPTIVE CONTROL AND SIGNAL PROCESSING, 2010, 24 (10) : 811 - 812
[28] Advanced DSP for Optical Access Networks: Challenges and Opportunities
Iiyama, Noriko
Kani, Jun-ichi
Suzuki, Ken-ichi
Ootaka, Akihiro
2015 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC), 2015,
[29] Advanced level nursing in England: organisational challenges and opportunities
East, Linda
Knowles, Kate
Pettman, Maria
Fisher, Leslie
JOURNAL OF NURSING MANAGEMENT, 2015, 23 (08) : 1011 - 1019
[30] IC Design Challenges and Opportunities for Advanced Process Technology
Lee, Hsien-Hsin S.
2015 International symposium on VLSI Design, Automation and Test (VLSI-DAT), 2015,

← 1 2 3 4 5 →