共 50 条
- [45] Investigation of Antimony Oxide Films Deposited by Atomic Layer Deposition DIELECTRICS FOR NANOSYSTEMS 5: MATERIALS SCIENCE, PROCESSING, RELIABILITY, AND MANUFACTURING -AND-TUTORIALS IN NANOTECHNOLOGY: MORE THAN MOORE - BEYOND CMOS EMERGING MATERIALS AND DEVICES, 2012, 45 (03): : 461 - 473
- [48] The annealing effect on work function variation of WNxCy films deposited by remote plasma atomic layer deposition PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2017, 214 (07):
- [49] Hafnium oxide and zirconium oxide atomic layer deposition: Initial precursor and potential side-reaction product pathways with H/Si(100)-2 x 1 JOURNAL OF PHYSICAL CHEMISTRY B, 2005, 109 (11): : 4969 - 4976