Single trench SiON waveguide TE-TM mode converter

被引：0
|
作者：
Nakayama, K. [1 ]
Shoji, Y. [1 ]
Mizumoto, T. [1 ]
机构：
[1] Tokyo Inst Technol, Meguro Ku, Tokyo 1528552, Japan
来源：
2012 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2012年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A TE-TM mode converter fabricated with a single trench SiON waveguide is described. The device has the advantage that only single mask and etching process is needed to fabricate. 80% TE-TM mode conversion is demonstrated.
引用
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页数：2
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