Irradiation of the graphite-like carbon films by ns-laser pulse

被引：15

作者：

Marcinauskas, Liutauras ^{[1
,2
]}

Grigonis, Alfonsas ^{[2
]}

Valatkevicius, Pranas ^{[1
]}

Medvid, Artur ^{[3
]}

机构：

[1] Lithuanian Energy Inst, Plasma Proc Lab, LT-44403 Kaunas, Lithuania

[2] Kaunas Univ Technol, Dept Phys, LT-51368 Kaunas, Lithuania

[3] Riga Tech Univ, LV-1048 Riga, Latvia

来源：

APPLIED SURFACE SCIENCE | 2012年 / 261卷

关键词：

Graphite-like carbon; Laser irradiation; Raman spectroscopy;

D O I：

10.1016/j.apsusc.2012.08.042

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The effect of a nanosecond laser irradiation of graphite-like carbon (GLC) films deposited on Si substrate by the plasma jet technique was analyzed in this work. The GLC coatings were irradiated by the nanosecond Nd:YAG lasers operating at 1064 nm (infrared (IR) radiation) and 532 nm (visible (VIS) radiation), using a multi-shot regime. The laser irradiations lead to the surface ablation and partial disarrangement of the GLC coatings. The IR laser irradiation stimulates an increase in the fraction of the sp(2) carbon bonds and formation of the nano-graphite cluster. The formation of SiC and graphite nanocrystallites was observed after VIS laser radiation by 24 MW/cm(2) energy density. FTIR results demonstrated that the reflectance of the laser irradiated carbon films decreases. (C) 2012 Elsevier B. V. All rights reserved.

引用

页码：488 / 492

页数：5

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