Indentation-induced phase transformations in silicon as a function of history of unloading

被引:2
|
作者
Fujisawa, N. [1 ]
Keikotlhaile, R. T. [1 ]
Bradby, J. E. [1 ]
Williams, J. S. [1 ]
机构
[1] Australian Natl Univ, Dept Elect Mat Engn, Res Sch Phys Sci & Engn, Canberra, ACT 0200, Australia
基金
澳大利亚研究理事会;
关键词
D O I
10.1557/JMR.2008.0322
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A crystalline silicon surface, loaded by a Berkovich indenter to a constant maximum load, was unloaded using three unload functions, each consisting of five linear segments of equal time period. The first function had an exponentially decaying unload rate and was found to promote a pop-out event more readily than the second function, having a linear unload rate, or the third case with its unload rate increasing with time. Statistical analyses of experimental data suggest that the unload rate within 20%-30% of the maximum load, when the mean contact pressure in the indent volume is roughly 5 to 6 GPa, is the most dominant factor influencing the probabilistic occurrence of a pop-out event. Unload rates at higher load levels were shown to have a much less significant effect on the probability of pop-out occurrence.
引用
收藏
页码:2645 / 2649
页数:5
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