Contrast variations in white-light speckle interferometry with application to 3D profilometry

被引：0
|
作者：
Lulli, A [1 ]
Zanetta, P [1 ]
Lucia, AC [1 ]
Casagrande, F [1 ]
机构：
[1] UNIV MILAN,DIPARTIMENTO FIS,INFM,I-20133 MILAN,ITALY
来源：
OPTICS COMMUNICATIONS | 1996年 / 124卷 / 5-6期
关键词：
D O I：
10.1016/0030-4018(95)00666-4
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We investigated the interference of a white-light speckle pattern, obtained by reflection from a rough surface, with a reference beam. A theoretical analysis has been developed to derive the expression of the speckle contrast, observed in the image plane of a telescopic system, as a function of all the parameters of the interference device. A numerical evaluation of the contrast dependence on the optical path difference is presented, as well as its experimental verification. On the basis of these results on the speckle contrast properties a method has been developed for 3D profilometry of relatively large optically rough objects, using real-time digital image processing.
引用
收藏
页码：550 / 557
页数：8
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