High mobility large area single crystal III-V thin film templates directly grown on amorphous SiO2 on silicon

被引:6
|
作者
Tao, Jun [1 ]
Sarkar, Debarghya [1 ]
Weng, Sizhe [1 ]
Orvis, Thomas [2 ]
Ahsan, Ragib [1 ]
Kale, Salil [1 ]
Xu, Yunpeng [1 ]
Chae, Hyun Uk [1 ]
Greer, Frank [3 ]
Ravichandran, Jayakanth [2 ]
Sideris, Constantine [1 ]
Kapadia, Rehan [1 ]
机构
[1] Univ Southern Calif, Ming Hsieh Dept Elect & Comp Engn, Los Angeles, CA 90089 USA
[2] Univ Southern Calif, Mork Family Dept Chem Engn & Mat Sci, Los Angeles, CA 90089 USA
[3] CALTECH, Jet Prop Lab, Microdevices Lab, 4800 Oak Grove Dr, Pasadena, CA 91109 USA
基金
美国国家航空航天局; 美国国家科学基金会;
关键词
HIGH-ELECTRON-MOBILITY;
D O I
10.1063/5.0006954
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this Letter, we report the direct growth of single crystal III-V thin film mesas on amorphous SiO2 on Si using templated liquid phase growth. Unlike previous works, where crystal sizes demonstrated have been less than similar to 10 mu m, here, we show that by tuning the crystal growth conditions, crystals with dimensions greater than 100 mu m and of high electron mobility can be directly grown on oxides. Specifically, InAs-on-oxide with mobilities reaching 5100cm(2)/Vs at 100K, and similar to 3200cm(2)/Vs at room temperature has been demonstrated. The excellent electronic performance is due to the single crystallinity of the grown material and creates new avenues for the monolithic direct integration of high-performance materials on non-epitaxial substrates, including silicon, and amorphous substrates, such as glasses and metals.
引用
收藏
页数:4
相关论文
共 50 条
  • [1] Measurement and simulation of interfacial adhesion strength between SiO2 thin film and III-V material
    Chou, Tsung-Lin
    Yang, Shin-Yueh
    Wu, Chung-Jung
    Han, Cheng-Nan
    Chiang, Kou-Ning
    MICROELECTRONICS RELIABILITY, 2011, 51 (9-11) : 1757 - 1761
  • [2] Thickness dependence of mobility in CuPc thin film on amorphous SiO2 substrate
    Gao, J.
    Xu, J. B.
    Zhu, M.
    Ke, N.
    Ma, Dongge
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (18) : 5666 - 5669
  • [3] III-V micro- and nano-lasers deposited on amorphous SiO2
    Han, Yu
    Yan, Zhao
    Ng, Wai Kit
    Xue, Ying
    Ng, Kar Wei
    Wong, Kam Sing
    Lau, Kei May
    APPLIED PHYSICS LETTERS, 2020, 116 (17)
  • [4] 60 GHz Bandwidth Directly Modulated Membrane III-V Lasers on SiO2/Si
    Diamantopoulos, Nikolaos-Panteleimon
    Fujii, Takuro
    Yamaoka, Suguru
    Nishi, Hidetaka
    Takeda, Koji
    Tsuchizawa, Tai
    Segawa, Toru
    Kakitsuka, Takaaki
    Matsuo, Shinji
    JOURNAL OF LIGHTWAVE TECHNOLOGY, 2022, 40 (10) : 3299 - 3306
  • [5] Heterogeneously Integrated Lasers using Epitaxially Grown III-V Active Layer on Directly Bonded InP/SiO2/Si Substrate
    Fujii, Takuro
    Takeda, Koji
    Kanno, Erina
    Hasebe, Koichi
    Nishi, Hidetaka
    Yamamoto, Tsuyoshi
    Kakitsuka, Takaaki
    Matsuo, Shinji
    2016 IEEE PHOTONICS CONFERENCE (IPC), 2016, : 540 - 541
  • [6] An ultra-thin SiO2 ALD layer for void-free bonding of III-V material on silicon
    Talneau, A.
    Pantzas, K.
    Durnez, A.
    Patriarche, G.
    Alamarguy, D.
    Le Bourhis, E.
    MICROELECTRONIC ENGINEERING, 2016, 162 : 40 - 44
  • [7] Integration of a thin film III-V edge emitting laser and a polymer microring resonator on an SiO2/Si substrate
    Palit, Sabarni
    Royal, Matthew
    Jokerst, Nan
    Kirch, Jeremy
    Mawst, Luke
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2012, 30 (01):
  • [8] High-efficiency flexible III-V photovoltaic solar cells based on single-crystal-like thin films directly grown on metallic tapes
    Pouladi, Sara
    Rathi, Monika
    Khatiwada, Devendra
    Asadirad, Mojtaba
    Oh, Seung Kyu
    Dutta, Pavel
    Yao, Yao
    Gao, Ying
    Sun, Sicong
    Li, Yongkuan
    Shervin, Shahab
    Lee, Keon-Hwa
    Selvamanickam, Venkat
    Ryou, Jae-Hyun
    PROGRESS IN PHOTOVOLTAICS, 2019, 27 (01): : 30 - 36
  • [9] III-V Thin-Film Photovoltaic Solar Cells Based on Single-Crystal-Like GaAs Grown on Flexible Metal Tapes
    Asadirad, Mojtaba
    Rathi, Monika
    Pouladi, Sara
    Yao, Yao
    Dutta, Pavel
    Shervin, Shahab
    Lee, Keon Hwa
    Zheng, Nan
    Ahrenkiel, Phil
    Selvamanickam, Venkat
    Ryou, Jae-Hyun
    2016 IEEE 43RD PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC), 2016, : 1954 - 1956
  • [10] Effect of Film Thickness on Magnetic Properties of FePt Thin Films Deposited on Amorphous SiO2 Substrate Directly
    Shen, C. L.
    Kuo, P. C.
    Lin, G. P.
    Chen, S. C.
    Huang, K. T.
    IEEE TRANSACTIONS ON MAGNETICS, 2011, 47 (10) : 3889 - 3892