An optomechanical pressure sensor using multimode interference couplers

被引：5
|
作者：
Hah, D [1 ]
Yoon, E [1 ]
Hong, S [1 ]
机构：
[1] Korea Adv Inst Sci & Technol, Dept Elect Engn, Taejon 305338, South Korea
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 4B期
关键词：
optomechanical pressure sensor; multimode interference couplers; p(+)-Si membrane; strip-loaded silica waveguide; photoelastic effect;
D O I：
10.1143/JJAP.38.2664
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A new optomechanical pressure sensor using multimode interference (MMI) couplers and a thin p(+)-Si membrane is presented. We simulate the device characteristics by the normal mode theory considering deflection and strain of the membrane. The optical waveguide is made of a single-mode, strip-loaded SiO2-SiNx-SiO2 system. Device size can be reduced to 0.5 x 13 mm(2) by using a MMI coupler, and the total thickness of the membrane is 5.9 mu m. The measured sensitivity is 11.98 ppm/Pa in a range of 50 kPa, which is larger than that of conventional capacitive sensors.
引用
收藏
页码：2664 / 2668
页数：5
相关论文
共 50 条
  • [1] An optomechanical pressure sensor using multimode interference couplers with polymer waveguides on a thin p+-Si membrane
    Hah, D
    Yoon, E
    Hong, S
    SENSORS AND ACTUATORS A-PHYSICAL, 2000, 79 (03) : 204 - 210
  • [2] Multimode interference couplers using polymeric optical waveguides
    Hsu, CW
    Chen, HL
    Wang, WS
    APOC 2001: ASIA-PACIFIC OPTICAL AND WIRELESS COMMUNICATIONS: OPTICAL FIBER AND PLANAR WAVEGUIDE TECHNOLOGY, 2001, 4579 : 84 - 91
  • [3] Mode multiplexing and demultiplexing devices using multimode interference couplers
    Kawaguchi, Y
    Tsutsumi, K
    ELECTRONICS LETTERS, 2002, 38 (25) : 1701 - 1702
  • [4] Sensing Performance of a Refractometric Optical Sensor Platform Based on Multimode Interference Couplers
    Copperwhite, Robert
    Oubaha, Mohamed
    Moore, John
    McDonagh, Colette
    MacCraith, Brian D.
    IEEE SENSORS JOURNAL, 2011, 11 (12) : 3269 - 3275
  • [5] Fiber Optic Pressure Sensor Using a Conformal Polymer on Multimode Interference Device
    May-Arrioja, Daniel A.
    Ruiz-Perez, Victor I.
    Bustos-Terrones, Yaneth
    Basurto-Pensado, Miguel A.
    IEEE SENSORS JOURNAL, 2016, 16 (07) : 1956 - 1961
  • [6] Controlling multimode optomechanical interactions via interference
    Kuzyk, Mark C.
    Wang, Hailin
    PHYSICAL REVIEW A, 2017, 96 (02)
  • [7] Re-inventing Multimode Interference Couplers Using Subwavelength Gratings
    Ortega-Monux, A.
    Halir, R.
    Maese-Novo, A.
    Alonso-Ramos, C.
    Zavargo-Peche, L.
    Perez-Galacho, D.
    Molina-Fernandez, I.
    Wangueemert-Perez, J. G.
    Cheben, P.
    Schmid, J. H.
    Lapointe, J.
    Xu, D.
    Janz, S.
    2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE AND INTERNATIONAL QUANTUM ELECTRONICS CONFERENCE (CLEO EUROPE/IQEC), 2013,
  • [8] Multimode Interference Couplers With Reduced Parasitic Reflections
    Kleijn, Emil
    Melati, Daniele
    Melloni, Andrea
    de Vries, Tjibbe
    Smit, Meint K.
    Leijtens, Xaveer J. M.
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2014, 26 (04) : 408 - 410
  • [9] Pulse Response of Nonlinear Multimode Interference Couplers
    Ogusu, Kazuhiko
    Li, Hongpu
    IEEE JOURNAL OF QUANTUM ELECTRONICS, 2014, 50 (04) : 295 - 303
  • [10] Novel chemical sensor/biosensor platform based on optical multimode interference (MMI) couplers
    Kribich, KR
    Copperwhite, R
    Barry, H
    Kolodziejczyk, B
    Sabattié, JM
    O'Dwyer, K
    MacCraith, BD
    SENSORS AND ACTUATORS B-CHEMICAL, 2005, 107 (01) : 188 - 192
12345