Robust Mid-Infrared Photothermal Imaging System for Characterization of Thin Films at High Spatial Resolution

被引:0
|
作者
Totachawattana, Atcha [1 ,2 ]
Huang, Di [1 ,2 ]
Li, Le [2 ,3 ]
Brawn, Keith A. [2 ,3 ,4 ,5 ]
Erramilli, Shyamsunder [2 ,5 ,6 ]
Sander, Michelle Y. [1 ,2 ,4 ]
机构
[1] Boston Univ, Dept Elect & Comp Engn, Boston, MA 02215 USA
[2] Boston Univ, BU Photon Ctr, Boston, MA 02215 USA
[3] Boston Univ, Dept Mech Engn, Boston, MA 02215 USA
[4] Boston Univ, Div Mat Sci & Engn, Boston, MA 02215 USA
[5] Boston Univ, Dept Phys, 590 Commonwealth Ave, Boston, MA 02215 USA
[6] Boston Univ, Dept Biomed Engn, Boston, MA 02215 USA
关键词
CONTRAST;
D O I
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We demonstrate robust performance of a mid-infrared photothermal imaging system with sensitive detection. Imaging of a patterned thin film shows a resolving power of 3.1 mu m, below the diffraction-limited spot size of the pump beam.
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页数:2
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