Preparation and characterization of TiO2 thin films by the sol-gel process

被引：74
|
作者：
Wen, T
Gao, JP
Shen, JY
Zhou, ZS
机构：
[1] Chinese Acad Sci, Shanghai Inst Ceram, Dept 3, Shanghai 200050, Peoples R China
[2] NW Inst Light Ind, Dept Mat, Xianyang 712081, Shaanxi, Peoples R China
来源：
JOURNAL OF MATERIALS SCIENCE | 2001年 / 36卷 / 24期
关键词：
D O I：
10.1023/A:1012989012840
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Titanium dioxide (TiO2) thin films have been prepared on microscope slide by the sol-gel process. The preparation of covering solution is investigated with the method of orthogonal experimental design, and the heat treatment temperature and time, which influenced on the films properties are discussed. And the TiO2 thin films had been studied by the means of differential thermal analysis (DTA), X-ray diffraction (XRD) and scanning electron microscopy (SEM). (C) 2001 Kluwer Academic Publishers.
引用
收藏
页码：5923 / 5926
页数：4
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