An injection micromixer fabricated by improved SU-8 processing for biochemical microfluidic systems

被引：0
|
作者：
Liu, Changgeng [1 ]
Ling, Zhong-geng [1 ]
Lian, Kun [1 ]
Goettert, Jost [1 ]
Hormes, Josef [1 ]
机构：
[1] Louisiana State Univ, CAMD, 6980 Jefferson Highway, Baton Rouge, LA 70806 USA
来源：
MICROFLUIDICS, BIOMEMS, AND MEDICAL MICROSYSTEMS IV | 2006年 / 6112卷
关键词：
micromixer; microfluidics; simulation; SU-8; microfabrication;
D O I：
10.1117/12.646049
中图分类号：
Q5 [生物化学];
学科分类号：
071010 ; 081704 ;
摘要：
In this research, first a modular polymer-based (PMMA) injection micromixer prototype has been designed, fabricated and tested. This micromixer is easy to be integrated into biochemical microfluidic systems under development for BioMagnetICs DARPA funded project at CAMD. To improve the mixing efficiency, layout of micronozzles of the mixer was optimized according to the simulation results. Also because SU-8, an epoxy-based negative photoresist, has high chemical resistance, an SU-8 injection mixer was designed and fabricated to run some biochemical sample liquids. Internal stress in patterned SU-8 structures has been reduced and multi-layer SU-8 processing has been successfully developed to fabricate SU-8 injection mixer.
引用
收藏
页数：7
相关论文
共 50 条
  • [21] ADHESIVE BONDING WITH SU-8 AT WAFER LEVEL FOR MICROFLUIDIC DEVICES
    Yu, Liming
    Tay, Francis E. H.
    Xu, Guolin
    Chen, Bangtao
    Avram, Marioara
    Iliescu, Ciprian
    INTERNATIONAL MEMS CONFERENCE 2006, 2006, 34 : 776 - 781
  • [22] Dynamic coating of SU-8 microfluidic chips with phospholipid disks
    Sikanen, Tiina
    Wiedmer, Susanne K.
    Heikkila, Liisa
    Franssila, Sami
    Kostiainen, Risto
    Kotiaho, Tapio
    ELECTROPHORESIS, 2010, 31 (15) : 2566 - 2574
  • [23] Adhesive bonding by SU-8 transfer for assembling microfluidic devices
    Salvo, P.
    Verplancke, R.
    Bossuyt, F.
    Latta, D.
    Vandecasteele, B.
    Liu, C.
    Vanfleteren, J.
    MICROFLUIDICS AND NANOFLUIDICS, 2012, 13 (06) : 987 - 991
  • [24] Fabricating microfluidic valve master molds in SU-8 photoresist
    Dy, Aaron J.
    Cosmanescu, Alin
    Sluka, James
    Glazier, James A.
    Stupack, Dwayne
    Amarie, Dragos
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2014, 24 (05)
  • [25] Optical Nanostructures Fabricated by SU-8 based Nanoimprint Lithography
    Liu, R.
    Lu, B. -R.
    Xie, S. -Q.
    Wan, J.
    Shu, Z.
    Qu, X. -P.
    Chen, Y.
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2009, 55 (03) : 1290 - 1294
  • [26] Force controlled SU-8 micropipettes fabricated with a sideways process
    Han, Hana
    Martinez, Vincent
    Aebersold, Mathias J.
    Luchtefeld, Ines
    Polesel-Maris, Jerome
    Voros, Janos
    Zambelli, Tomaso
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2018, 28 (09)
  • [27] Taguchi optimization for the processing of Epon SU-8 resist
    Eyre, B
    Blosiu, J
    Wiberg, D
    MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS, 1998, : 218 - 222
  • [28] Monolithic SU-8 micro-interferometer for biochemical detections
    Shew, B. Y.
    Cheng, Y. C.
    Tsai, Y. H.
    SENSORS AND ACTUATORS A-PHYSICAL, 2008, 141 (02) : 299 - 306
  • [29] Low-pressure bonding of monolithic SU-8 microfluidic devices
    Narayan, Suman
    Bae, Kraun
    Lehn, Robert
    Yadav, Sandeep
    Ott, Marcus
    Meckel, Tobias
    Stark, Robert W.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2018, 28 (12)
  • [30] Ionic liquids as modifiers for glass and SU-8 electrochemical microfluidic chips
    Alvarez-Martos, Isabel
    Garcia Alonso, Francisco Javier
    Anillo, Adela
    Arias-Abrodo, Pilar
    Dolores Gutierrez-Alvarez, Maria
    Costa-Garcia, Agustin
    Teresa Fernandez-Abedul, Maria
    SENSORS AND ACTUATORS B-CHEMICAL, 2013, 188 : 837 - 846
12345