An injection micromixer fabricated by improved SU-8 processing for biochemical microfluidic systems

被引：0
|
作者：
Liu, Changgeng [1 ]
Ling, Zhong-geng [1 ]
Lian, Kun [1 ]
Goettert, Jost [1 ]
Hormes, Josef [1 ]
机构：
[1] Louisiana State Univ, CAMD, 6980 Jefferson Highway, Baton Rouge, LA 70806 USA
来源：
MICROFLUIDICS, BIOMEMS, AND MEDICAL MICROSYSTEMS IV | 2006年 / 6112卷
关键词：
micromixer; microfluidics; simulation; SU-8; microfabrication;
D O I：
10.1117/12.646049
中图分类号：
Q5 [生物化学];
学科分类号：
071010 ; 081704 ;
摘要：
In this research, first a modular polymer-based (PMMA) injection micromixer prototype has been designed, fabricated and tested. This micromixer is easy to be integrated into biochemical microfluidic systems under development for BioMagnetICs DARPA funded project at CAMD. To improve the mixing efficiency, layout of micronozzles of the mixer was optimized according to the simulation results. Also because SU-8, an epoxy-based negative photoresist, has high chemical resistance, an SU-8 injection mixer was designed and fabricated to run some biochemical sample liquids. Internal stress in patterned SU-8 structures has been reduced and multi-layer SU-8 processing has been successfully developed to fabricate SU-8 injection mixer.
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页数：7
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