High-Q Microring Resonators With 2 x 2 Angled Multimode Interference Couplers

被引:4
|
作者
Jin, Li [1 ]
Wang, Jianwei [1 ]
Fu, Xin [1 ]
Yang, Bo [1 ]
Shi, Yaocheng [1 ]
Dai, Daoxin [1 ]
机构
[1] Zhejiang Univ, Ctr Opt & Electromagnet Res, State Key Lab Modern Opt Instrumentat, Zhejiang Prov Key Lab Sensing Technol, Hangzhou 310058, Zhejiang, Peoples R China
基金
中国国家自然科学基金;
关键词
Angled; microring resonator (MRR); multimode interference (MMI) coupler; Q-factor; FABRICATION;
D O I
10.1109/LPT.2013.2244079
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High Q-factor microring resonators (MRRs) with 2 x 2 angled multimode interference (MMI) couplers are realized based on SU-8 polymer strip waveguides, which has an SU-8 polymer core, an SiO2 buffer, and an air cladding. The present MRR has a small radius (150 mu m) because of the high-index contrast of the SU-8 optical waveguides. The coupling ratio of the angled MMI couplers is adjusted to achieve a high-loaded Q-factor MRR by modifying the bending angle. When this bending angle is chosen as 3.25 degrees, the Q-factor of the fabricated MRR is about 25 000.
引用
收藏
页码:612 / 614
页数:3
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