Silicon nanowire based Pirani sensor for vacuum measurements

Nano-Pirani vacuum gauges based on the physical properties of suspended silicon nanowires have been fabricated and characterized. With a 160 x 260 nm(2) rectangular section and a 5.2 mu m length, they are 50 times smaller than the smallest silicon based vacuum sensor and they exhibits much lower power consumption. The nano-Pirani constructed are capable of measuring pressures from 50 to 10(5) Pa. Moreover, their fabrication is compatible with microelectronic and micromachining fabrication techniques making them suitable for in-situ monitoring of micro and nano systems vacuum packaging. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4765665]