Enhanced Sensitivity of SAW-Based Pirani Vacuum Pressure Sensor

被引：22

作者：

Singh, Kanwar J. ^{[1
]}

Elmazria, Omar ^{[1
]}

Sarry, Frederic ^{[1
]}

Nicolay, Pascal ^{[2
]}

Ghoumid, Kamal ^{[3
]}

Belgacem, Brahim ^{[4
]}

Mercier, Denis ^{[5
]}

Bounouar, Julien ^{[6
]}

机构：

[1] Inst Jean Lamour, F-54506 Nancy, France

[2] EPCOS SAS, World Trade Ctr, F-06560 Valbonne Sophia Antipoli, France

[3] FEMTO ST, F-25044 Besancon, France

[4] Senseor, F-25000 Besancon, France

[5] CEA LETI MINATEC, F-38054 Grenoble, France

[6] ALCATEL Vacuum Technol France AVTF, ADIXEN, F-74009 Annecy, France

来源：

IEEE SENSORS JOURNAL | 2011年 / 11卷 / 06期

关键词：

Acoustic devices; frequency response; pressure measurements; sensitivity; HIGH-TEMPERATURE; DEVICE FABRICATION; PERFORMANCE; EMISSIVITY;

D O I：

10.1109/JSEN.2010.2086055

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The authors have already presented a novel surface acoustic wave device for vacuum pressure measurement by employing a piezoelectric substrate that has a high value of temperature coefficient of frequency. Frequency-shift measurements as a function of vacuum pressure can be used to extract information about the pressure sensitivity of the device. In this paper, we report that the deposition of an aluminum thin-film layer and rise in the sensor's operating temperature significantly improve the sensitivity of the device. The results are crucial for improving the lower limit of the vacuum pressure measurement, which currently stands around 10(-3) Pa.

引用

页码：1458 / 1464

页数：7

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