Fabrication and characterization of nanoporous ZnO layers for sensing applications

被引：9
|
作者：
Wagner, Alexander [1 ]
Bakin, Andrey [1 ]
Otto, Torsten [1 ]
Zimmermann, Mandy [2 ]
Jahn, Burkhardt [2 ]
Waag, Andreas [1 ]
机构：
[1] Tech Univ Carolo Wilhelmina Braunschweig, Inst Halbleitertech, D-38106 Braunschweig, Germany
[2] Grillo Zinkoxid GmbH, D-38644 Goslar, Germany
来源：
THIN SOLID FILMS | 2012年 / 520卷 / 14期
关键词：
ZnO; Compression method; Porous layer; Photoresponse; Sensing; MANUFACTURING NANOSTRUCTURED ELECTRODES; ULTRAVIOLET PHOTODETECTORS; FILMS; NANOWIRE;
D O I：
10.1016/j.tsf.2011.10.210
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this contribution we employ a low temperature method for the deposition of thin and highly porous layers based on ZnO nanocrystallites. The method is based on coating of a substrate with ZnO suspension and thereafter the application of quasi static pressure on the sample. A high temperature step becomes redundant and the temperature does not exceed 120 degrees C during the whole process. The porosity, the specific surface area and the pore size distribution can be influenced by the variation of the process pressure. The influence of oxygen and water vapor on the photoresponse is investigated and a model explaining the observed behavior is discussed. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码：4662 / 4665
页数：4
相关论文
共 50 条
  • [41] Fabrication and characterization of thin film CdO nanoparticles for gas sensing applications
    B. Amudhavalli
    R. Mariappan
    M. Prasath
    R. N. Jayaprakash
    Journal of Materials Science: Materials in Electronics, 2024, 35
  • [42] Fabrication and characterization of ordered nanoporous Ni membranes
    Xu, YQ
    Cai, WL
    Wang, YH
    Mou, JM
    ACTA PHYSICO-CHIMICA SINICA, 2001, 17 (11) : 991 - 994
  • [43] Fabrication and characterization of nanoporous carbon/silica membranes
    Park, HB
    Lee, YM
    ADVANCED MATERIALS, 2005, 17 (04) : 477 - +
  • [44] Fabrication and Characterization of Nanoporous Polymer Track Membrane
    Wang M.
    Wang X.
    Liu F.
    Wang Y.
    Yuanzineng Kexue Jishu/Atomic Energy Science and Technology, 2019, 53 (10): : 2120 - 2128
  • [45] Nanoporous gold plasmonic structures for sensing applications
    Ruffato, G.
    Romanato, F.
    Garoli, D.
    Cattarin, S.
    OPTICS EXPRESS, 2011, 19 (14): : 13164 - 13170
  • [46] Fabrication and characterization of nanoporous Ag–Pt alloy
    Tao Yin
    Fan-Yun Meng
    Min Zhang
    Ying-Wei Yan
    Rare Metals, 2021, 40 : 1203 - 1207
  • [47] Boron-doped homoepitaxial diamond layers: Fabrication, characterization, and electronic applications
    Borst, TH
    Weis, O
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1996, 154 (01): : 423 - 444
  • [48] Boron-doped homoepitaxial diamond layers: fabrication, characterization, and electronic applications
    Borst, T.H.
    Weis, O.
    Physica Status Solidi (A) Applied Research, 1996, 154 (01): : 423 - 444
  • [49] Fabrication and characterization of buried silicide layers on SOI substrates for BICMOS-applications
    Zimmermann, S
    Zhao, QT
    Trui, B
    Wiemer, M
    Kaufmann, C
    Mantl, S
    Dudek, V
    Gessner, T
    MICROELECTRONIC ENGINEERING, 2005, 82 (3-4) : 454 - 459
  • [50] Fabrication, characterization and gas sensing properties of three-dimensional network of ZnO tetrapods
    Delaunay, Jean-Jacques
    Kakoiyama, Naoki
    Yamada, Ichiro
    ZINC OXIDE MATERIALS AND DEVICES, 2006, 6122
12345