A Method to Reduce Forming Voltage Without Degrading Device Performance in Hafnium Oxide-Based 1T1R Resistive Random Access Memory

被引:27
|
作者
Su, Yu-Ting [1 ]
Liu, Hsi-Wen [1 ]
Chen, Po-Hsun [1 ]
Chang, Ting-Chang [1 ]
Tsai, Tsung-Ming [2 ]
Chu, Tian-Jian [2 ]
Pan, Chih-Hung [2 ]
Wu, Cheng-Hsien [2 ]
Yang, Chih-Cheng [2 ]
Wang, Min-Chuan [3 ]
Zhang, Shengdong [4 ]
Wang, Hao [5 ]
Sze, Simon M. [6 ]
机构
[1] Natl Sun Yat Sen Univ, Dept Phys, Kaohsiung 80424, Taiwan
[2] Natl Sun Yat Sen Univ, Dept Mat & Optoelect Sci, Kaohsiung 80424, Taiwan
[3] Atom Energy Council, Inst Nucl Energy Res, Taoyuan 32546, Taiwan
[4] Peking Univ, Sch Elect & Comp Engn, Shenzhen 518055, Peoples R China
[5] Hubei Univ, Fac Phys & Elect Sci, Wuhan 430062, Hubei, Peoples R China
[6] Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USA
来源
关键词
Forming voltage; temperature; rising time; charge accumulation; 1T1R; RRAM;
D O I
10.1109/JEDS.2018.2805285
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we discover an operation method that can effectively decrease the forming voltage in resistance random access memory (RRAM). Forming voltage can be reduced by either increasing the rising time of the forming-waveform or by increasing the temperature in the forming process. However, the resulting electronic RRAM characteristics after each of these methods differ. While increasing the rising time causes greater damage to the switching layer due to longer accumulation of charge, increasing temperature in the forming process does not. The high temperature-formed RRAM excels in retention and endurance tests, proving an effective means to decrease forming voltage.
引用
收藏
页码:341 / 345
页数:5
相关论文
共 32 条
  • [1] Analog Memory Characteristics of 1T1R MoOx Resistive Random Access Memory
    Jo, Mingyu
    Katsumura, Reon
    Tsurumaki-Fukuchi, Atsushi
    Arita, Masashi
    Takahashi, Yasuo
    Ando, Hideyuki
    Morie, Takashi
    [J]. 2016 IEEE SILICON NANOELECTRONICS WORKSHOP (SNW), 2016, : 78 - 79
  • [2] Functionally Complete Boolean Logic in 1T1R Resistive Random Access Memory
    Wang, Zhuo-Rui
    Su, Yu-Ting
    Li, Yi
    Zhou, Ya-Xiong
    Chu, Tian-Jian
    Chang, Kuan-Chang
    Chang, Ting-Chang
    Tsai, Tsung-Ming
    Sze, Simon M.
    Miao, Xiang-Shui
    [J]. IEEE ELECTRON DEVICE LETTERS, 2017, 38 (02) : 179 - 182
  • [3] Incorporation of a bipolar incremental step pulse programming with thermal forming to reduce the forming voltage in 1T1R structure resistance random access memory
    Chen, Po-Hsun
    Zheng, Hao-Xuan
    Su, Yu-Ting
    [J]. APPLIED PHYSICS EXPRESS, 2020, 13 (05)
  • [4] Heavy Ion Radiation Effects on Hafnium Oxide-Based Resistive Random Access Memory
    Petzold, Stefan
    Sharath, S. U.
    Lemke, Jonas
    Hildebrandt, Erwin
    Trautmann, Christina
    Alff, Lambert
    [J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2019, 66 (07) : 1715 - 1718
  • [5] Reducing Forming Voltage by Applying Bipolar Incremental Step Pulse Programming in a 1T1R Structure Resistance Random Access Memory
    Zheng, Hao-Xuan
    Chang, Ting-Chang
    Xue, Kan-Hao
    Su, Yu-Ting
    Wu, Cheng-Hsien
    Shih, Chih-Cheng
    Tseng, Yi-Ting
    Chen, Wen-Chung
    Huang, Wei-Chen
    Chen, Chun-Kuei
    Miao, Xiang-Shui
    Sze, Simon M.
    [J]. IEEE ELECTRON DEVICE LETTERS, 2018, 39 (06) : 815 - 818
  • [6] Incorporation of Resistive Random Access Memory into Low-Temperature Polysilicon Transistor with Fin-Like Structure as 1T1R Device
    Huang, Wei-Chen
    Zheng, Hao-Xuan
    Chen, Po-Hsun
    Chang, Ting-Chang
    Tan, Yung-Fang
    Lin, Shih-Kai
    Zhang, Yong-Ci
    Jin, Fu-Yuan
    Wu, Chung-Wei
    Yeh, Yu-Hsuan
    Chou, Sheng-Yao
    Huang, Hui-Chun
    Chen, Yan-Wen
    Sze, Simon M.
    [J]. ADVANCED ELECTRONIC MATERIALS, 2020, 6 (06)
  • [7] Solving the issue of increasing forming voltage during device miniaturization in hafnium oxide-based resistive access memory using high-k sidewall material
    Yang, Fei
    He, Zijian
    Liu, Bingkun
    Hu, Bo
    Lou, Shilong
    Li, Duogui
    Wang, Wentao
    [J]. NANOTECHNOLOGY, 2023, 34 (50)
  • [8] Stochastic multiscale model for HfO2-based resistive random access memories with 1T1R configuration
    Guitarra, Silvana
    Raymond, Laurent
    Trojman, Lionel
    [J]. SOLID-STATE ELECTRONICS, 2021, 176
  • [9] A Unified Current-Voltage Model for Metal Oxide-Based Resistive Random-Access Memory
    Chung, Harry
    Shin, Hyungsoon
    Park, Jisun
    Sun, Wookyung
    [J]. MATERIALS, 2023, 16 (01)
  • [10] Electro-Thermal Cosimulation of Vertical One-Transistor-One-Resistor (1T1R) Resistive Random Access Memory and Array
    Zhai, Xingyu
    Li, Erping
    Niu, Yiqun
    Li, Da
    Chen, Wenchao
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2024, 71 (08) : 5110 - 5117