Design and Characterization of the CLICTD Pixelated Monolithic Sensor Chip

被引:4
|
作者
Kremastiotis, I. [1 ]
Ballabriga, R. [1 ]
Campbell, M. [1 ]
Dannheim, D. [1 ]
Dort, K. [1 ,2 ]
Egidos, N. [1 ,3 ]
Kroger, J. [1 ,4 ]
Linssen, L. [1 ]
Llopart, X. [1 ]
Munker, M. [1 ]
Nurnberg, A. [5 ]
Peric, I. [5 ]
Spannagel, S. [1 ,6 ]
Vanat, T. [1 ]
Williams, M. [1 ,7 ]
机构
[1] CERN, CH-1211 Geneva, Switzerland
[2] Justus Liebig Univ Giessen, Dept Expt Phys 2, D-35390 Giessen, Germany
[3] Univ Barcelona, Doctoral Sch Engn & Appl Sci, Barcelona 08007, Spain
[4] Heidelberg Univ, Dept Phys & Astron, D-69117 Heidelberg, Germany
[5] Karlsruhe Inst Technol, D-76131 Karlsruhe, Germany
[6] DESY, D-22607 Hamburg, Germany
[7] Univ Glasgow, Sch Phys & Astron, Glasgow G12 8QQ, Lanark, Scotland
关键词
Electrodes; Detectors; Capacitance; Silicon; Substrates; Epitaxial layers; Semiconductor device measurement; Monolithic CMOS sensors; silicon pixel detectors; DETECTORS;
D O I
10.1109/TNS.2020.3019887
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel monolithic pixelated sensor and readout chip, the compact linear collider tracker detector (CLICTD) chip, is presented. The CLICTD chip was designed targeting the requirements of the silicon tracker development for the experiment at the compact linear collider (CLIC) and has been fabricated in a modified 180 nm CMOS imaging process with charge collection on a high-resistivity p-type epitaxial layer. The chip features a matrix of 16 x 128 elongated channels, each measuring 300 x 30 mu m(2). Each channel contains 8 equidistant collection electrodes and analog readout circuits to ensure prompt signal formation. A simultaneous 8-bit time-of-arrival (with 10 ns time bins) and 5-bit time-over-threshold measurement is performed on the combined digital output of the 8 subpixels in every channel. The chip has been fabricated in two process variants and characterized in laboratory measurements using electrical test pulses and radiation sources. Results show a minimum threshold between 135 and 180 e(-) and a noise of about 14 e(-) rms. The design aspects and characterization results of the CLICTD chip are presented.
引用
收藏
页码:2263 / 2272
页数:10
相关论文
共 50 条
  • [11] Design of a monolithic resonant force sensor for microforce measurements
    Béjuy B.
    Boukallel M.
    Grossard M.
    Gautier G.
    Journal Europeen des Systemes Automatises, 2010, 44 (07): : 727 - 742
  • [12] An innovative gas sensor with on-chip reference using monolithic twin laser
    Zhang Yong-Gang
    Tian Zhao-Bing
    Zhang Xiao-Jun
    Gu Yi
    Li Ai-Zhen
    Zhu Xiang-Rong
    Zheng Yan-Lan
    Liu Sheng
    CHINESE PHYSICS LETTERS, 2007, 24 (10) : 2839 - 2841
  • [13] Development of an on-chip configurable DAC module for monolithic active pixel sensor
    Tian, Y.
    Yang, P.
    Wang, Q.
    Zhou, W.
    Niu, X.
    Huang, J.
    Zhao, C.
    JOURNAL OF INSTRUMENTATION, 2022, 17 (03):
  • [14] Design and characterization of a monolithic amplifier for millimeter wave
    Marzolf, É
    Drissi, M
    Zenkouar, L
    ICM 2001: 13TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS, PROCEEDINGS, 2001, : 177 - 180
  • [15] Monolithic microfabricated ion trap chip design for scaleable quantum processors
    Brownnutt, M.
    Wilpers, G.
    Gill, P.
    Thompson, R. C.
    Sinclair, A. G.
    NEW JOURNAL OF PHYSICS, 2006, 8
  • [16] Design of a monolithic 2 MHz fast transient voltage regulator chip
    Deng, HF
    Huang, AQ
    Feuerbacher, A
    Ma, Y
    ISPSD '04: PROCEEDINGS OF THE 16TH INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES & ICS, 2004, : 383 - 386
  • [17] Design and modeling of on-chip monolithic transformers with patterned ground shield
    El-Gharniti, Ouail
    Kerherve, Eric
    Begueret, Jean-Baptiste
    2006 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS, VOLS 1-11, PROCEEDINGS, 2006, : 2313 - +
  • [18] Design of On-Chip Integrated Hall Sensor
    Wang Lei
    Zhao Mao
    Pan Hongbing
    He Shuzhuan
    Li Wei
    PROCEEDINGS OF THE THIRD INTERNATIONAL SYMPOSIUM ON TEST AUTOMATION & INSTRUMENTATION, VOLS 1 - 4, 2010, : 482 - 485
  • [19] Design and Fabrication of a Miniature FAIMS Sensor Chip
    Li Hua
    Wang Xiao-Hao
    Tang Fei
    Zhang Liang
    Yang Ji
    Lin Tao
    Ding Li
    ACTA PHYSICO-CHIMICA SINICA, 2010, 26 (05) : 1355 - 1363
  • [20] Crosstalk Characterization of a Two-Tier Pixelated Avalanche Sensor for Charged Particle Detection
    Ficorella, Andrea
    Pancheri, Lucio
    Brogi, Paolo
    Collazuol, Gianmaria
    Dalla Betta, Gian-Franco
    Marrocchesi, Pier Simone
    Morsani, Fabio
    Ratti, Lodovico
    Savoy-Navarro, Aurore
    IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2018, 24 (02)