Polarization contrast in reflection near-field optical microscopy with uncoated fibre tips

被引:0
|
作者
Bozhevolnyi, SI [1 ]
Langbein, W [1 ]
Hvam, JM [1 ]
机构
[1] Tech Univ Denmark, Mikroelekt Ctr, DK-2800 Lyngby, Denmark
来源
关键词
contrast mechanisms; near-field optics; polarization contrast; resolution; scanning near-field optical microscopy;
D O I
暂无
中图分类号
TH742 [显微镜];
学科分类号
摘要
Using cross-hatched, patterned semiconductor surfaces and round 20-nm-thick gold pads on semiconductor wafers, we investigate the imaging characteristics of a reflection nearfield optical microscope with an uncoated fibre tip for different polarization configurations and light wavelengths. It is shown that cross-polarized detection allows one to effectively suppress far-field components in the detected signal and to realize imaging of optical contrast on the subwavelength scale. The sensitivity window of our microscope, i.e. the scale on which near-field optical images represent mainly optical contrast, is found to be approximate to 100 nm for light wavelengths in the visible region. We demonstrate imaging of near-field components of a dipole field and purely dielectric contrast (related to well-width fluctuations in a semiconductor quantum well) with a spatial resolution of approximate to 100 nm. The results obtained show that such a nearfield technique can be used for polarization-sensitive imaging with reasonably high spatial resolution and suggest a number of applications for this technique.
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收藏
页码:500 / 506
页数:7
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