Three-dimensional microscope vision system based on micro laser line scanning and adaptive genetic algorithms

A microscope vision system to retrieve small metallic surface via micro laser line scanning and genetic algorithms is presented. In this technique, a 36 pm laser line is projected on the metallic surface through a laser diode head, which is placed to a small distance away from the target. The micro laser line is captured by a CCD camera, which is attached to the microscope. The surface topography is computed by triangulation by means of the line position and microscope vision parameters. The calibration of the microscope vision system is carried out by an adaptive genetic algorithm based on the line position. In this algorithm, an objective function is constructed from the microscope geometry to determine the microscope vision parameters. Also, the genetic algorithm provides the search space to calculate the microscope vision parameters with high accuracy in fast form. This procedure avoids errors produced by the missing of references and physical measurements, which are employed by the traditional microscope vision systems. The contribution of the proposed system is corroborated by an evaluation via accuracy and speed of the traditional microscope vision systems, which retrieve micro-scale surface topography.