Machining of optical micro-mold by laser-induced chemical etching

被引：3
|
作者：
Gan, Zihao [1 ,2 ,3 ]
Peng, Xiaoqiang [1 ,2 ,3 ]
Guan, Chaoliang [1 ,2 ,3 ]
机构：
[1] Natl Univ Def Technol, Coll Intelligent Sci, Changsha 410073, Hunan, Peoples R China
[2] Natl Univ Def Technol, Lab Sci & Technol Integrated Logist Support, De Ya Rd, Changsha 410073, Hunan, Peoples R China
[3] Hunan Key Lab Ultraprecis Machining Technol, Changsha 410073, Hunan, Peoples R China
来源：
AIP ADVANCES | 2019年 / 9卷 / 05期
关键词：
PULSE LASER; ABLATION; FABRICATION; GRATINGS; DAMAGE; SHAPE;
D O I：
10.1063/1.5095590
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Triangular grating has an important application in modern optical field. The large-scale production of such components can be realized by injection molding process, among which the fabrication of optical molds is the most important technology. This paper proposed to adopt femtosecond laser-induced chemical etching to make a micro-mold based on triangular diffraction gratings. Based on theoretical analysis and processing experiments, we studied the feasibility applied to manufacture the microstructure of optical mold. (c) 2019 Author(s).
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页数：8
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