Ellipsometry: dielectric functions of anisotropic crystals and symmetry

被引：5

作者：

Jellison Jr, Gerald E. ^{[1
]}

Podraza, Nikolas J. ^{[2
,3
]}

Shan, Ambalanath ^{[2
,3
]}

机构：

[1] Oak Ridge Natl Lab, Oak Ridge, TN 30831 USA

[2] Univ Toledo, Wright Ctr Photovolta Innovat & Commercializat, Toledo, OH 43606 USA

[3] Univ Toledo, Dept Phys & Astron, Toledo, OH 43606 USA

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 2022年 / 39卷 / 12期

关键词：

PARTIAL POLARIMETRY EXPERIMENT; COMPLETE MUELLER MATRIX; GENERALIZED ELLIPSOMETRY; OPTICAL FUNCTIONS; SPECTROSCOPIC ELLIPSOMETRY; THIN-FILM; UNIAXIAL MATERIALS; SILICON; PARAMETERS; CONSTANTS;

D O I：

10.1364/JOSAA.471958

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The optical functions of anisotropic materials can be determined using generalized ellipsometry, which can measure the cross-polarization coefficients (CPs) of the sample surface reflections. These CPs have several symmetry relations with respect to the symmetry of the crystal. This paper explores the symmetry relations of these CPs for uniaxial, orthorhombic, and monoclinic crystals and the requirements for generalized ellipsometry. Several ellipsometry measurement configurations are examined, including the requirements for the accurate measurements of the dielectric functions of anisotropic crystals. (c) 2022 Optica Publishing Group

引用

页码：2225 / 2237

页数：13

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