Common-path tandem interferometer for thin-film thickness measurements

被引：1
|
作者：
Lin, Shyh-Tsong [1 ]
Le, Hoang-Quy [1 ]
机构：
[1] Natl Taipei Univ Technol, Dept Electroopt Engn, 1,Sec 3,Zhongxiao E Rd, Taipei 10608, Taiwan
来源：
MEASUREMENT | 2023年 / 214卷
关键词：
Common -path tandem interferometer; Thin-film thickness; Full -field measurement; Non -contact measurement; Measurement repeatability; Environmental perturbation; OPTICAL COHERENCE TOMOGRAPHY; REFRACTIVE-INDEX; CONFOCAL MICROSCOPY; TRANSPARENT PLATES; SURFACE; SYSTEM;
D O I：
10.1016/j.measurement.2023.112780
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Conventional optical interferometers utilized for gauging thin-film thickness can offer non-contact, high-resolution, and full-field measurements but have to endure the noise caused by environmental perturbations. Possessing not only the superior performance of conventional interferometers but also the advantages of high measurement repeatability and high tolerance to environmental disturbances, a common-path tandem interferometer was proposed. In this paper, the interferometer's measurement theory and experimental setup are demonstrated, and the experimental results from the uses of the experimental setup are then presented and discussed. The experimental results validate the interferometer and show a measurement repeatability of up to 3 nm, curve fitting inaccuracy is one reason causing the measurement error; in addition, the results agree with the interferometer's high resistance to environmental perturbations.
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页数：8
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