Common-path laser interferometer

被引：16
|
作者：
Qu, Xing-hua [1 ]
Wang, Li-hua [1 ,2 ]
Fu, Yun-xia [2 ]
机构：
[1] Tianjin Univ, State Key Lab Precis Measuring Technol & Instrume, Tianjin 300072, Peoples R China
[2] Shanghai Inst Measurement & Testing Technol, Shanghai 201203, Peoples R China
来源：
OPTICS LETTERS | 2009年 / 34卷 / 24期
关键词：
ACCURACY; SYSTEM;
D O I：
10.1364/OL.34.003809
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A common-path laser interferometer is introduced. Its most important feature is that two optical arms are entirely in a common path. Laser Doppler and laser polarization interference technologies are used in the proposed optical system. An experiment setup is established. The primary experimental result shows that this common path method is very feasible. The resolution is 0.72 nm within a 0.01 mm range, and the highest velocity is 0.56 mm/s. There is much room to improve its performance. (C) 2009 Optical Society of America
引用
收藏
页码：3809 / 3811
页数：3
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