Scalable Hybrid CMOS-Diamond Quantum Magnetometers

Nitrogen-vacancy (NV) centers in diamond have demonstrated outstanding sensing and imaging capabilities. However, their conventional implementations have used discrete instrumentation for microwave generation and optical readout, which increases the system scale. This work presents a chip-scale complementary-metaloxide-semiconductor (CMOS) platform that integrates the necessary components for NV quantum state control and measurement. Specifically, a scalable CMOS integrated system capable of the control and readout of an ensemble of NV centers for vector magnetic field sensing is discussed. We demonstrate a sensitivity of 245 nT/Hz1/2, representing 130x improvement over our previous CMOS-diamond sensor prototype. This scalable architecture opens the door for sub-nT/Hz1/2 sensitivity in the future and the possibility of incorporating additional functionalities.