3D-Printed Electrostatic Microactuators for Flexible Microsystems

Developing small-scale, lightweight, and flexible devices with integrated microactuators is one of the critical challenges in wearable haptic devices, soft robotics, and microrobotics. In this study, a novel fabrication process that leverages the benefits of 3D printing with two-photon polymerization and flexible printed circuit boards (FPCBs) is presented. This method enables flexible microsystems with 3D-printed electrostatic microactuators, which are demonstrated in a flexible integrated micromirror array and a legged microrobot with a mass of 4 mg. 3D electrostatic actuators on FPCBs are robust enough to actuate the micromirrors while the device is deformed, and they are easily integrated with off-the-shelf electronics. The crawling robot is one of the lightest legged microrobots actuated without external fields, and the legs actuated with 3D electrostatic actuators enable a locomotion speed of 0.27 body length per second. The proposed fabrication framework opens up a pathway toward a variety of highly integrated flexible microsystems.