A lexicographic optimization approach for a bi-objective parallel-machine scheduling problem minimizing total quality loss and total tardiness

被引：4
|
作者：
Chen, Lu [1 ]
Yang, Wenhui [1 ]
Qiu, Kejun [1 ]
Dauzere-Peres, Stephane [2 ,3 ]
机构：
[1] Shanghai Jiao Tong Univ, Sch Mech Engn, Shanghai 200240, Peoples R China
[2] Univ Clermont Auvergne, Dept Mfg Sci & Logist, Mines St Etienne, CNRS,UMR 6158,LIMOS,CMP, Gardanne, France
[3] BI Norwegian Business Sch, Dept Accounting Auditing & Business Analyt, N-0484 Oslo, Norway
来源：
COMPUTERS & OPERATIONS RESEARCH | 2023年 / 155卷
基金：
中国国家自然科学基金;
关键词：
Parallel-machine scheduling; Lexicographic optimization; Maintenance; Quality loss; Total tardiness; DETERIORATING JOBS; RATIONAL CHOICE; MAINTENANCE; ALGORITHM; MODEL; REPLACEMENT; METHODOLOGY; SYSTEMS; SEARCH;
D O I：
10.1016/j.cor.2023.106245
中图分类号：
TP39 [计算机的应用];
学科分类号：
081203 ; 0835 ;
摘要：
In wafer fabrication, production quality is a key performance index and is subject to machine condition deterioration. This paper studies a parallel-machine scheduling problem that can typically be found in the photolithography process. To solve the problem, a lexicographic optimization approach is proposed where the total quality loss is firstly minimized and the second objective is to minimize total tardiness. An optional maintenance activity is also considered to restore the machine condition to a certain level. Optimality properties are discussed, based on which an exact scheduling algorithm is developed. Experimental analyses derived from real data demonstrate the effectiveness of the proposed algorithm and support some managerial insights.
引用
收藏
页数：14
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