Phononic-Crystal-Based SAW Magnetic-Field Sensors

被引:3
|
作者
Samadi, Mohsen [1 ]
Schmalz, Julius [1 ]
Meyer, Jana Marie [2 ]
Lofink, Fabian [2 ,3 ,4 ]
Gerken, Martina [1 ,3 ]
机构
[1] Univ Kiel, Dept Elect & Informat Engn, Integrated Syst & Photon, Kaiserstr 2, D-24143 Kiel, Germany
[2] Fraunhofer Inst Silicon Technol ISIT, D-25524 Itzehoe, Germany
[3] Univ Kiel, Kiel Nano Surface & Interface Sci KiNSIS, Kaiserstr 2, D-24143 Kiel, Germany
[4] Univ Kiel, Dept Mat Sci, Microsyst Mat, Kaiserstr 2, D-24143 Kiel, Germany
关键词
magnetic field sensing; phononic crystal; surface acoustic waves; Delta E effect; NONLINEAR CONSTITUTIVE RELATIONS; ACOUSTIC-WAVES;
D O I
10.3390/mi14112130
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
In this theoretical study, we explore the enhancement of sensing capabilities in surface acoustic wave (SAW)-based magnetic field sensors through the integration of engineered phononic crystals (PnCs). We particularly focus on amplifying the interaction between the SAW and magnetostrictive materials within the PnC structure. Through comprehensive simulations, we demonstrate the synchronization between the SAWs generated by IDTs and the resonant modes of PnCs, thereby leading to an enhancement in sensitivity. Furthermore, we investigate the Delta E effect, highlighting the sensor's responsiveness to changes in external magnetic fields, and quantify its magnetic sensitivity through observable changes in the SAW phase velocity leading to phase shifts at the end of the delay line. Notably, our approach yields a magnetic field sensitivity of approximately S similar to 138 degrees/mT for a delay line length of only 77 mu m in homogeneous magnetic fields. Our findings underline the potential of PnCs to advance magnetic field sensing. This research offers insights into the integration of engineered materials for improved sensor performance, paving the way for more effective and accurate magnetic field detection solutions.
引用
收藏
页数:14
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