Design and Experiment of MEMS Solid-State Wave Gyroscope Quadrature Error Correction System

被引：4

作者：

Cui, Rang ^{[1
]}

Li, Ke ^{[1
]}

Xu, Xin ^{[2
]}

Xue, Rihui ^{[3
]}

Shen, Chong ^{[1
]}

Shi, Yunbo ^{[1
]}

Cao, Huiliang ^{[1
]}

机构：

[1] North Univ China, Sch Instrument & Elect, Sci & Technol Elect Test & Measurement Lab, Taiyuan 030051, Peoples R China

[2] Xian Microelect Inst, Xian 710065, Peoples R China

[3] Xian Inst Electromech Informat Technol, Xian 710065, Peoples R China

来源：

IEEE SENSORS JOURNAL | 2023年 / 23卷 / 15期

基金：

中国国家自然科学基金;

关键词：

MEMS gyroscope; quadrature error; solid-state wave gyroscope;

D O I：

10.1109/JSEN.2023.3281775

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel gyroscope quadrature error correction system based on quadrature force correction is introduced in this article. The source of quadrature error of MEMS solid-state wave gyroscope is analyzed. The main source of quadrature error is the inevitable machining error. The gyroscope system model is established, the quadrature error correction method is proposed, and the quadrature error correction system is simulated. Through the comparative test, the gyroscope with quadrature error correction system has a better performance. With the addition of quadrature error correction system, the scale factor of the gyroscope changes from 1.13 to 1.02 mV/degrees/s, the nonlinearity is increased from 1382.7 to 795.4 ppm, and the asymmetry is improved from 1532.4 to 945.1 ppm, the angle random walk (ARW) from 269.1 to 39.45 degrees/h/v Hz, and the bias stability from 46.62 to 6.785 degrees/h.

引用

下载

页码：16645 / 16655

页数：11

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