A High Sensitivity Quantitative Method to Detect Micro Scale Optics' Internal Defects and Impurity

被引：0

作者：

He, Jiang ^{[1
]}

Zhang, Teresa ^{[1
]}

Zhou, Wei ^{[1
]}

机构：

[1] MLOptic Corp, Redmond, WA 98052 USA

来源：

PHOTONIC INSTRUMENTATION ENGINEERING X | 2023年 / 12428卷

关键词：

Optics impurity; Imaging system defect inspection; stray light analysis; machine vision inspection;

D O I：

10.1117/12.2645703

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper discusses a high sensitivity quantitative method to efficiently detect the defect existence and allocate the impurity down to single micron level. This methodology by nature only enhances the defects within the signal path no matter on the optics surface, in the coating or inside the glass material, which fundamentally helps on high contrast optics like the AR/VR metrology lens which mimics human eye's sensitivity, or deep space observation optics or biology imaging system.

引用

页数：6

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