Laser printed microelectronics

被引:49
|
作者
Yang, Liang [1 ,2 ,7 ]
Hu, Hongrong [1 ]
Scholz, Alexander [1 ]
Feist, Florian [1 ]
Marques, Gabriel Cadilha [1 ]
Kraus, Steven [1 ,2 ]
Bojanowski, Niklas Maximilian [1 ]
Blasco, Eva [1 ,3 ,4 ]
Barner-Kowollik, Christopher [1 ,5 ,6 ]
Aghassi-Hagmann, Jasmin [1 ]
Wegener, Martin [1 ,2 ]
机构
[1] Karlsruhe Inst Technol KIT, Inst Nanotechnol INT, D-76128 Karlsruhe, Germany
[2] Karlsruhe Inst Technol KIT, Inst Appl Phys APH, D-76128 Karlsruhe, Germany
[3] Heidelberg Univ, Inst Organ Chem, Neuenheimer Feld 270, D-69120 Heidelberg, Germany
[4] Heidelberg Univ, IMSEAM, Neuenheimer Feld 225 & 270, D-69120 Heidelberg, Germany
[5] Queensland Univ Technol QUT, Sch Chem & Phys, 2 George St, Brisbane, Qld 4000, Australia
[6] Queensland Univ Technol QUT, Ctr Mat Sci, 2 George St, Brisbane, Qld 4000, Australia
[7] Univ Sci & Technol China USTC, Suzhou Inst Adv Res, Suzhou 215127, Peoples R China
基金
澳大利亚研究理事会; 美国国家科学基金会;
关键词
GOLD NANOPARTICLES; METAL; GROWTH;
D O I
10.1038/s41467-023-36722-7
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Printed organic and inorganic electronics continue to be of large interest for several applications. Here, the authors propose laser printing as a facile process for fabricating printed electronics with minimum feature sizes below 1 mu m and demonstrate functional diodes, memristors, and physically unclonable functions. Printed organic and inorganic electronics continue to be of large interest for sensors, bioelectronics, and security applications. Many printing techniques have been investigated, albeit often with typical minimum feature sizes in the tens of micrometer range and requiring post-processing procedures at elevated temperatures to enhance the performance of functional materials. Herein, we introduce laser printing with three different inks, for the semiconductor ZnO and the metals Pt and Ag, as a facile process for fabricating printed functional electronic devices with minimum feature sizes below 1 mu m. The ZnO printing is based on laser-induced hydrothermal synthesis. Importantly, no sintering of any sort needs to be performed after laser printing for any of the three materials. To demonstrate the versatility of our approach, we show functional diodes, memristors, and a physically unclonable function based on a 6 x 6 memristor crossbar architecture. In addition, we realize functional transistors by combining laser printing and inkjet printing.
引用
收藏
页数:10
相关论文
共 50 条
  • [41] Laser welding of functional and constructional ceramics for Microelectronics
    Exner, H
    Nagel, AM
    LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING IV, 1999, 3618 : 262 - 268
  • [42] Laser Assisted Microstructuring of Amorphous Silicon for Microelectronics
    Halim, M. M.
    Abdolvand, A.
    Fan, Y.
    Persheyev, S. K.
    Main, C.
    Rafailov, E. U.
    Rose, M. J.
    2010 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) AND QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (QELS), 2010,
  • [43] Laser technology targets microelectronics defect detection
    Seaton, C
    PHOTONICS SPECTRA, 2003, 37 (08) : 74 - +
  • [44] Laser micromachining in the microelectronics industry: A historical overview
    Swenson, EJ
    Sun, YL
    Dunsky, C
    LASER BEAM SHAPING, 2000, 4095 : 118 - 132
  • [45] Laser micromachining in the microelectronics industry: Emerging applications
    Subrahmanyan, PK
    PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS II, 2003, 4977 : 188 - 197
  • [46] LASER-BEAM TECHNOLOGY FOR MICROELECTRONICS INDUSTRY
    WHITEHOUSE, DR
    IIGENFRI.RW
    SOLID STATE TECHNOLOGY, 1972, 15 (07) : 32 - +
  • [47] Hybrid light-laser welding for microelectronics
    Alekseev, GM
    Sysoev, VK
    Bulkin, YN
    Photon Processing in Microelectronics and Photonics IV, 2005, 5713 : 335 - 342
  • [48] Opportunities and challenges for laser technology in microelectronics and photonics
    Hoving, W
    PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS II, 2003, 4977 : 448 - 457
  • [49] Laser metallization for microelectronics and bio-applications
    Laude, LD
    Kolev, K
    Dicara, C
    Dupas-Bruzek, C
    PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS II, 2003, 4977 : 578 - 586
  • [50] Laser tunning silicon microdevices for analog microelectronics
    École Polytechnique de Montréal, Département de Génie Physique, Case Postale 6079, succ. Centre-Ville, Montréal
    QC
    H3C 3A7, Canada
    不详
    QC
    H3C 3A7, Canada
    不详
    QC
    H7V 4B4, Canada
    Proc SPIE Int Soc Opt Eng, 1600, (205-207):