Growth of non-polar m-plane GaN pseudo-substrates by Molecular beam epitaxy

被引:3
|
作者
Fernando-Saavedra, Amalia [1 ,2 ]
Albert, Steven [1 ,2 ]
Bengoechea-Encabo, Ana [1 ,2 ]
Trampert, Achim [3 ]
Xie, Mengyao [4 ]
Sanchez-Garcia, Miguel A. [1 ,2 ]
Calleja, Enrique [1 ,2 ]
机构
[1] Univ Politecn Madrid, ISOM, Ave Complutense 30,Ciudad Univ, Madrid 28040, Spain
[2] Univ Politecn Madrid, Dept Ingn Elect, ETSI Telecomunicac, Ave Complutense 30,Ciudad Univ, Madrid 28040, Spain
[3] Paul Drude Inst Festkoperelektron, Hausvogteipl 5-7, D-10117 Berlin, Germany
[4] Tianrui Semicond Mat Suzhou Ltd Co, Third Zone Datong Rd 20, Suzhou 215151, Peoples R China
关键词
A1; Etching; A3; Molecular beam epitaxy; Selective epitaxy; B1; Nitrides; B2; Semiconducting III -V materials; SELECTIVE-AREA GROWTH; NANOCOLUMNS; LAYERS;
D O I
10.1016/j.jcrysgro.2023.127272
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Non-polar m-plane GaN films were grown by Plasma Assisted Molecular Beam Epitaxy on & gamma;-LiAlO2 (100) sub-strates by a controlled coalescence of GaN nanocolumns obtained by a two-step process including a top-down nanopillars etching from a GaN buffer and a subsequent bottom-up overgrowth. Transmission electron micro-scopy data show a significant reduction of extended defects density in the coalesced film as compared to the initial GaN buffer, most likely due to a filter effect by the regrowth process on the nanopillars inclined walls. Low temperature photoluminescence spectra back this reduction by a strong intensity decrease of the stacking faults fingerprint emission peaks, while a very intense donor-bound excitonic emission at 3.472 eV, 2.8 meV wide, becomes dominant.
引用
收藏
页数:6
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