Femtosecond laser and oscillation induced large-scale periodic micro/nanostructures on copper surfaces

Femtosecond laser micro-nano machining has become an important field for novel material and/or structure fabrications. In this paper, we propose a new and efficient laser micro-nano fabrication technique on the metal surface, in which, a femtosecond laser combined with the ultralow frequency periodic oscillation of a two-phase stepping motor was used to fabricate a large-scale 20 mu m period micro/nanostructures on the copper metal surface by line scanning. The copper foils fabricated by this femtosecond laser show excellent superhydrophobic properties. Subsequently, we use femtosecond laser Z-shaped line scanning, combined with a two-phase stepping motor with ultralow frequency periodic oscillation, works on copper foil fabricate a micropores structure with a period span of 20 mu m. In addition, we simulated the butterfly wing superhydro-phobic micro/nanostructures on copper plates and fabricated superhydrophobic copper surfaces. This technique lays a solid foundation for the practical application of femtosecond laser lithography and is expected to be extended to other materials for new device applications.