Large-Scale Black Silicon Induced by Femtosecond Laser Assisted With Laser Cleaning

被引：0
|
作者：
Wen, Zhidong [1 ,2 ]
Shi, Haiyan [1 ]
Yue, Song [1 ]
Li, Man [1 ]
Zhang, Zhe [1 ,2 ]
Wang, Ran [1 ]
Song, Qi [3 ]
Xu, Ziye [3 ]
Zhang, Zichen [1 ]
Hou, Yu [1 ]
机构：
[1] Microelectronics Instruments and Equipment RD Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
[2] School of Microelectronics, University of Chinese Academy of Sciences, Beijing, China
[3] International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun, China
来源：
Frontiers in Physics | 2022年 / 10卷
关键词：
39;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
下载
收藏
相关论文
共 50 条
  • [1] Large-Scale Black Silicon Induced by Femtosecond Laser Assisted With Laser Cleaning
    Wen, Zhidong
    Shi, Haiyan
    Yue, Song
    Li, Man
    Zhang, Zhe
    Wang, Ran
    Song, Qi
    Xu, Ziye
    Zhang, Zichen
    Hou, Yu
    FRONTIERS IN PHYSICS, 2022, 10
  • [2] Large-Scale Wideband Light-Trapping Black Silicon Textured by Laser Inducing Assisted with Laser Cleaning in Ambient Air
    Wen, Zhidong
    Zhang, Zhe
    Zhang, Kunpeng
    Li, Jiafa
    Shi, Haiyan
    Li, Man
    Hou, Yu
    Xue, Mei
    Zhang, Zichen
    NANOMATERIALS, 2022, 12 (10)
  • [3] Fabrication of Large-Scale Silicon Nitride Resonator by Femtosecond Laser
    Zuo Feng
    He, Yuming
    Han, Weihua
    Li, Zhaofeng
    24TH NATIONAL LASER CONFERENCE & FIFTEENTH NATIONAL CONFERENCE ON LASER TECHNOLOGY AND OPTOELECTRONICS, 2020, 11717
  • [4] Femtosecond laser induced periodic large-scale surface structures on metals
    Dong, Xiangming
    Song, Haiying
    Liu, Shibing
    CHINESE OPTICS LETTERS, 2015, 13 (07)
  • [5] Femtosecond laser induced periodic large-scale surface structures on metals
    董祥明
    宋海英
    刘世炳
    Chinese Optics Letters, 2015, 13 (07) : 54 - 57
  • [6] Laser as a cleaning tool for the treatment of large-scale bronze monuments
    Dajnowski, A.
    LASERS IN THE CONSERVATION OF ARTWORKS, 2008, : 303 - 308
  • [7] Femtosecond laser-induced nanostructure-covered large-scale waves on metals
    Hwang, Taek Yong
    Guo, Chunlei
    APPLIED PHYSICS B-LASERS AND OPTICS, 2013, 113 (03): : 485 - 490
  • [8] Femtosecond laser and oscillation induced large-scale periodic micro/nanostructures on copper surfaces
    Shen, Xiaodong
    Zou, Bingsuo
    Huang, Chaowei
    Zhang, Yabin
    Liu, Tao
    Yang, Liang
    OPTICS AND LASER TECHNOLOGY, 2023, 161
  • [9] Femtosecond laser-induced nanostructure-covered large-scale waves on metals
    Taek Yong Hwang
    Chunlei Guo
    Applied Physics B, 2013, 113 : 485 - 490
  • [10] Development status of large-scale application of laser cleaning technology (invited)
    Jiang Y.
    He Y.
    Fu Y.
    Ji J.
    Tong Y.
    Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2023, 52 (02):
12345