Effect of cutting speed in single point diamond turning of (100)Ge

被引:1
|
作者
Tunesi, M. [1 ]
Sizemore, N. E. [2 ]
Davies, M. A. [2 ,3 ]
Lucca, D. A. [1 ]
机构
[1] Oklahoma State Univ, Sch Mech & Aerosp Engn, Stillwater, OK 74078 USA
[2] Univ North Carolina Charlotte, Ctr Precis Metrol, Charlotte, NC 28223 USA
[3] Moore Nanotechnol Syst, Charlotte, NC 28216 USA
关键词
Crystal structure; Deformation and fracture; Semiconductors; Surfaces;
D O I
10.1016/j.mfglet.2023.08.144
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this study the mechanical response of single crystal Ge machined over a range of cutting speeds of two orders of magnitude was investigated. Single crystal (100)Ge was machined by on-axis turning with a single crystal diamond tool. Surface topography was characterized by atomic force microscopy, and cutting and thrust forces were measured. It was found that increasing the cutting speed decreases the amount of brittle fracture left on the surface by the tool. It was also found that both the cutting and thrust forces decreased in magnitude as the cutting speed increased.(c) 2023 Society of Manufacturing Engineers (SME). Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码:15 / 18
页数:4
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