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Study on cubic boron nitride p-type element doping based on first-principles calculation
被引:1
|作者:
Chen, Jiashu
[1
]
Tao, Ming
[1
]
Xiao, Jing
[1
]
Shi, Mengchao
[1
]
Li, Junhua
[1
]
Ding, Xi
[1
]
Huang, Bowen
[2
]
Liu, Jie
[1
]
机构:
[1] Hunan Univ, Coll Elect & Informat Engn, Changsha 410082, Hunan, Peoples R China
[2] Hunan Univ, Coll Mat Sci & Engn, Changsha 410082, Peoples R China
基金:
中国博士后科学基金;
中国国家自然科学基金;
关键词:
Density functional theory;
Cubic boron nitride;
P -type doping;
Carrier concentrations;
TOTAL-ENERGY CALCULATIONS;
HIGH-PRESSURE SYNTHESIS;
ELECTRONIC-STRUCTURE;
THIN-FILMS;
C-BN;
ELECTRICAL CHARACTERISTICS;
SI;
TRANSITION;
DEPOSITION;
MG;
D O I:
10.1016/j.mssp.2023.107701
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
The difficulty in fabricating highly conductive p-type cubic boron nitride (c-BN) limits its application in power semiconductor devices. In this work, the p-type dopant element in c-BN is comprehensively screened and analyzed based on first-principles calculation. It is found that lithium (Li), beryllium (Be), magnesium (Mg) and zinc (Zn) substituted for boron (B) (Li-B, Be-B, Mg-B and Zn-B) each create acceptor levels and have lower formation energy under N-rich condition, ranking E-f (Be-B(0),BN) < E-f (Li-B(0),BN) < E-f (Mg-B(0),BN) < E-f (Zn-B(0),BN)B. Besides, the compensation effect of unintentionally doped interstitial impurities caused by small atomic radius (Li-i and Be-i) was also studied. The simulation results show that they are all donors under p-type condition, and Lii has a relatively low formation energy, which is most likely to compensate for the p-type doping of LiB. However, the predicted net free hole concentrations of LiB doping are about 10(18)similar to 10(19) cm(-3) when the temperature above 2000K under N-rich condition, which is only next to BeB doping, indicating that the compensating effect of Lii is not obvious. Considering that Be is toxic, these results suggest that Li is a good candidate p-type dopant for c-BN.
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页数:9
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