Simulation and analysis of enhancement-mode AlGaN/GaN HEMT with P-I-N junction gate

被引:2
|
作者
Jia, Mao [1 ]
Hou, Bin [1 ]
Yang, Ling [1 ]
Zhang, Meng [1 ]
Chang, Qingyuan [1 ]
Niu, Xuerui [1 ]
Shi, Chunzhou [2 ]
Du, Jiale [1 ]
Wu, Mei [1 ]
Lu, Hao [1 ]
Ma, Xiaohua [1 ]
Hao, Yue [1 ]
机构
[1] Xidian Univ, Sch Microelect, Natl Key Discipline Lab Wide Band Gap Semicond, Xian 710071, Peoples R China
[2] Xidian Univ, Sch Adv Mat & Nanotechnol, Xian 710071, Peoples R China
基金
中国博士后科学基金; 中国国家自然科学基金;
关键词
AlGaN/GaN heterostructure; normally-off; self-alignment process; PIN junction; gate reliability; HIGH-ELECTRON-MOBILITY; GAN; VOLTAGE;
D O I
10.1088/1361-6463/ad3764
中图分类号
O59 [应用物理学];
学科分类号
摘要
To improve the threshold voltage and gate reliability of conventional enhancement-mode p-GaN-gated AlGaN/GaN high electron mobility transistors while maintaining a low on-resistance, an improved design solution for p-GaN HEMTs with P-I-N junction gate (PIN-HEMTs) has been proposed. Simulation results show that energy band modulation is achieved by adjusting the doping concentration and thickness of each layer of the PIN junction, and high-performance p-GaN gate HEMTs with adjustable threshold voltages ranging from 0.56 V to 4.75 V and gate breakdown voltages ranging from 19.8 V to 30.3 V would be prepared. The PIN-HEMT has a quasi-self-alignment property, which means that good gate control is independent of gate metal alignment. This not only improves the production efficiency but also solves the problems of weak gate control and electric field aggregation at the gate edge caused by the gate misalignment in conventional p-GaN gate HEMTs, thus realizing lower on-resistance and higher gate breakdown voltage, which demonstrates this proposed structure has excellent potentials for realizing effective and reliable high-power transistors.
引用
收藏
页数:9
相关论文
共 50 条
  • [21] Dark Current Simulation of GaN/AlGaN p-i-n Avalanche Photodiode
    Cao, Z. X.
    Hu, W. D.
    Chen, X. S.
    Lu, W.
    Wang, L.
    Li, X. Y.
    [J]. NUSOD 2009: 9TH INTERNATIONAL CONFERENCE ON NUMERICAL SIMULATION OF OPTOELECTRONIC DEVICES, PROCEEDINGS, 2009, : 81 - +
  • [22] Simulation Study of Enhancement-Mode InAlN/GaN HEMT with InGaN Cap Layer
    Wei, Lin-Cheng
    Wang, Quan
    Feng, Chun
    Xiao, Hong-Ling
    Jiang, Li-Juan
    Wang, Cui-Mei
    Li, Wei
    Wang, Xiao-Liang
    Liu, Feng-Qi
    Xu, Xian-Gang
    Wang, Zhan-Guo
    [J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2018, 18 (11) : 7400 - 7404
  • [23] High performance AlInN/AlN/GaN p-GaN back barrier Gate-Recessed Enhancement-Mode HEMT
    Adak, Sarosij
    Sarkar, Arghyadeep
    Swain, Sanjit
    Pardeshi, Hemant
    Pati, Sudhansu Kumar
    Sarkar, Chandan Kumar
    [J]. SUPERLATTICES AND MICROSTRUCTURES, 2014, 75 : 347 - 357
  • [24] High Performance Enhancement-Mode AlGaN/GaN MIS-HEMT with Selective Fluorine Treatment
    Yang, Chao
    Xiong, Jiayun
    Wei, Jie
    Wu, Junfeng
    Zhang, Bo
    Luo, Xiaorong
    [J]. ADVANCES IN CONDENSED MATTER PHYSICS, 2015, 2015
  • [25] An AlN/Ultrathin AlGaN/GaN HEMT Structure for Enhancement-Mode Operation Using Selective Etching
    Anderson, Travis J.
    Tadjer, Marko J.
    Mastro, Michael A.
    Hite, Jennifer K.
    Hobart, Karl D.
    Eddy, Charles R., Jr.
    Kub, Francis J.
    [J]. IEEE ELECTRON DEVICE LETTERS, 2009, 30 (12) : 1251 - 1253
  • [26] A Gate Overdrive Protection Technique for Improved Reliability in AlGaN/GaN Enhancement-Mode HEMTs
    Kwan, Alex Man Ho
    Chen, Kevin J.
    [J]. IEEE ELECTRON DEVICE LETTERS, 2013, 34 (01) : 30 - 32
  • [27] Reliability of Enhancement-mode AlGaN/GaN HEMTs Under ON-State Gate Overdrive
    Ma, Chenyue
    Chen, Hongwei
    Zhou, Chunhua
    Huang, Sen
    Yuan, Li
    Roberts, John
    Chen, Kevin J.
    [J]. 2010 INTERNATIONAL ELECTRON DEVICES MEETING - TECHNICAL DIGEST, 2010,
  • [28] Forward Bias Gate Breakdown Mechanism in Enhancement-Mode p-GaN Gate AlGaN/GaN High-Electron Mobility Transistors
    Wu, Tian-Li
    Marcon, Denis
    You, Shuzhen
    Posthuma, Niels
    Bakeroot, Benoit
    Stoffels, Steve
    Van Hove, Marleen
    Groeseneken, Guido
    Decoutere, Stefaan
    [J]. IEEE ELECTRON DEVICE LETTERS, 2015, 36 (10) : 1001 - 1003
  • [29] Enhancement-mode AlGaN/GaN HEMTs on silicon substrate
    Jia, Shuo
    Cai, Yong
    Wang, Deliang
    Zhang, Baoshun
    Lau, Kei May
    Chen, Kevin J.
    [J]. PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 3, NO 6, 2006, 3 (06): : 2368 - 2372
  • [30] Enhancement-mode AlGaN/GaN HEMTs on silicon substrate
    Jia, Shuo
    Cai, Yong
    Wang, Deliang
    Zhang, Baoshun
    Lau, Kei May
    Chen, Kevin J.
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2006, 53 (06) : 1474 - 1477