Multispectral silicon-based photodetector with stacked PN junctions

被引:3
|
作者
Wang, Chenguang [1 ,2 ,3 ]
Zhao, Jiangting [2 ,3 ,4 ]
Cao, Huiliang [2 ,3 ,4 ]
Shen, Chong [2 ,3 ,4 ]
Tang, Jun [3 ,4 ,5 ]
Liu, Jun [3 ,4 ]
机构
[1] North Univ China, Sch Informat & Commun Engn, Taiyuan 030051, Shanxi, Peoples R China
[2] North Univ China, Natl Key Lab Dynam Testing Technol, Taiyuan 030051, Shanxi, Peoples R China
[3] North Univ China, Shanxi Prov Key Lab Quantum Sensing & Precis Measu, Taiyuan 030051, Shanxi, Peoples R China
[4] North Univ China, Sch Instrument & Elect, Taiyuan 030051, Shanxi, Peoples R China
[5] North Univ China, Sch Semicond & Phys, Taiyuan 030051, Shanxi, Peoples R China
基金
中国国家自然科学基金;
关键词
DESIGN;
D O I
10.1364/OE.495874
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A multispectral silicon-based photodetector structure with stacked PN junctions is proposed in this study. The substrate layer of the proposed photodetector consists of four vertically stacked PN junction structures that contain four photodiodes. The designed structure achieves quantum efficiency of up to 70% and a response time of 5.1 x 10-8 s. The proposed photodetector has a simple structure, and the vertically stacked PN junction structure not only reduces the phenomenon of color aliasing, but also achieves multispectral absorption over the range from ultraviolet to visible light with high response speeds, which provides an effective way to perform high-quality imaging.
引用
收藏
页码:33776 / 33786
页数:11
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