Development of a cryogen-free sub-3 K low-temperature scanning probe microscope by remote liquefaction scheme

被引:9
|
作者
Ma, Ruisong [1 ]
Li, Hao [2 ]
Shi, Chenshuai [2 ]
Wang, Fan [3 ]
Lei, Le [1 ]
Huang, Yuanzhi [1 ]
Liu, Yani [1 ]
Shan, Huan [1 ]
Liu, Li [1 ]
Huang, Shesong [3 ]
Niu, Zhi-Chuan [4 ]
Huan, Qing [1 ,5 ,6 ]
Gao, Hong-Jun [1 ,5 ,6 ]
机构
[1] Chinese Acad Sci, Beijing Natl Lab Condensed Matter Phys, POB 603, Beijing 100190, Peoples R China
[2] ACME Beijing Technol Co Ltd, Beijing 101407, Peoples R China
[3] Beijing Physike Technol Co Ltd, Beijing 100085, Peoples R China
[4] Chinese Acad Sci, Inst Semicond, State Key Lab Superlatt & Microstruct, Beijing 100083, Peoples R China
[5] Songshan Lake Mat Lab, Dongguan 523808, Guangdong, Peoples R China
[6] Univ Chinese Acad Sci, Key Lab Vacuum Phys, Beijing 100190, Peoples R China
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2023年 / 94卷 / 09期
基金
中国国家自然科学基金;
关键词
TUNNELING MICROSCOPE; SYSTEM;
D O I
10.1063/5.0165089
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We developed a new scheme for cryogen-free cooling down to sub-3 K temperature range and ultra-low vibration level. An ultra-high-vacuum cryogen-free scanning probe microscope (SPM) system was built based on the new scheme. Instead of mounting a below-decoupled cryocooler directly onto the system, the new design was realized by integrating a Gifford-McMahon cryocooler into a separate liquefying chamber, providing two-stage heat exchangers in a remote way. About 10 L of helium gas inside the gas handling system was cooled, liquefied in the liquefying chamber, and then transferred to a continuous-flow cryostat on the SPM chamber through an similar to 2 m flexible helium transfer line. The exhausted helium gas from the continuous-flow cryostat was then returned to the liquefying chamber for reliquefaction. A base temperature of similar to 2.84 K at the scanner sample stage and a temperature fluctuation of almost within +/- 0.1 mK at 4 K were achieved. The cooling curves, tunneling current noise, variable-temperature test, scanning tunneling microscopy and non-contact atomic force microscopy imaging, and first and second derivatives of I(V) spectra are characterized to verify that the performance of our cryogen-free SPM system is comparable to the bath cryostat-based low-temperature SPM system. This remote liquefaction close-cycle scheme shows conveniency to upgrade the existing bath cryostat-based SPM system, upgradeability of realizing even lower temperature down to sub-1 K range, and great compatibility of other physical environments, such as high magnetic field and optical accesses. We believe that the new scheme could also pave a way for other cryogenic applications requiring low temperature but sensitive to vibration.
引用
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页数:11
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