共 50 条
- [1] Design of an atomic layer deposition reactor for hydrogen sulfide compatibility REVIEW OF SCIENTIFIC INSTRUMENTS, 2010, 81 (04):
- [2] A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes REVIEW OF SCIENTIFIC INSTRUMENTS, 2015, 86 (11):
- [5] High Throughput Atomic Layer Deposition for Encapsulation of Large Area Electronics ATOMIC LAYER DEPOSITION APPLICATIONS 7, 2011, 41 (02): : 195 - 201
- [7] ATOMIC LAYER EPITAXY DEPOSITION PROCESSES JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (01): : 179 - 185
- [8] Design and implementation of a novel portable atomic layer deposition/chemical vapor deposition hybrid reactor REVIEW OF SCIENTIFIC INSTRUMENTS, 2013, 84 (09):
- [10] MODELING OF PRECURSOR FLOW AND DEPOSITION IN ATOMIC LAYER DEPOSITION REACTOR JOURNAL DE PHYSIQUE IV, 1995, 5 (C5): : 245 - 252