共 50 条
- [22] CHANNELING EFFECTS AT LOW-ENERGY ION-IMPLANTATION EPM 87: ENERGY PULSE AND PARTICLE BEAM MODIFICATION OF MATERIALS, 1988, 8 : 479 - 481
- [23] Low-energy carbon and nitrogen ion implantation in silicon JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (04): : 1124 - 1132
- [25] Hot implantation of Ga+ ion in SiC REPORT OF RESEARCH CENTER OF ION BEAM TECHNOLOGY, HOSEI UNIVERSITY, SUPPLEMENT NO 15, MARCH 1997, 1997, : 45 - 49
- [27] InN: Fermi level stabilization by low-energy ion bombardment PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 3, NO 6, 2006, 3 (06): : 1841 - 1845
- [28] DEFECT FORMATION IN LIF BY LOW-ENERGY ION-IMPLANTATION PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1985, 131 (01): : 87 - 96
- [29] LOW-ENERGY ION-IMPLANTATION AND ITS CHARACTERIZATION AND PROCESSING NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 74 (1-2): : 160 - 169
- [30] Low-energy Fe+ ion implantation into silicon nanostructures ADVANCED MATERIALS AND NANOTECHNOLOGY, PROCEEDINGS, 2009, 1151 : 149 - 152