Automatic Alignment of an Orbital Angular Momentum Sorter in a Transmission Electron Microscope Using a Convolutional Neural Network

被引:5
|
作者
Rosi, Paolo [1 ,2 ]
Clausen, Alexander [3 ]
Weber, Dieter [3 ]
Tavabi, Amir H. [3 ]
Frabboni, Stefano [1 ,2 ]
Tiemeijer, Peter [4 ]
Dunin-Borkowski, Rafal E. [3 ]
Rotunno, Enzo [1 ]
Grillo, Vincenzo [1 ]
机构
[1] Ist Nanosci, CNR, Via G Campi 213-A, I-41125 Modena, Italy
[2] Univ Modena & Reggio Emilia, FIM Dept, Via G Campi 213-A, I-41125 Modena, Italy
[3] Forschungszentrum Julich, Ernst Ruska Ctr Microscopy & Spect Elect, D-52425 Julich, Germany
[4] Thermo Fisher Sci, POB 80066, NL-5600 KA Eindhoven, Netherlands
基金
欧盟地平线“2020”;
关键词
artificial intelligence; electron beam shaping; electron vortex beam; orbital angular momentum sorter; transmission electron microscope; HIGH-RESOLUTION; ABERRATION; RONCHIGRAM; BEAMS;
D O I
10.1017/S143192762201248X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We report on the automatic alignment of a transmission electron microscope equipped with an orbital angular momentum sorter using a convolutional neural network. The neural network is able to control all relevant parameters of both the electron-optical setup of the microscope and the external voltage source of the sorter without input from the user. It can compensate for mechanical and optical misalignments of the sorter, in order to optimize its spectral resolution. The alignment is completed over a few frames and can be kept stable by making use of the fast fitting time of the neural network.
引用
收藏
页码:408 / 417
页数:10
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