Ferroelectric La-doped HfO2 deposited via chemical solution on silicon for tellurium field-effect phototransistors

被引:2
|
作者
Jeong, Uisik [1 ,2 ,3 ]
Rho, Hyun Yeol [1 ]
Cho, Haewon [1 ,3 ]
Naqi, Muhammad [1 ]
Oh, Joo On [1 ]
Cho, Yongin [1 ]
Pujar, Pavan [4 ]
Kim, Sunkook [1 ]
机构
[1] Sungkyunkwan Univ, Sch Adv Mat Sci & Engn, Multifunct Nano Bio Elect Lab, Suwon 16419, South Korea
[2] Sungkyunkwan Univ, Dept Semicond & Display Engn, Suwon 16419, South Korea
[3] Samsung Elect Co, DRAM Proc Architecture Team, Pyeongtaek 17786, South Korea
[4] Indian Inst Technol IIT BHU, Dept Ceram Engn, Varanasi 221005, Uttar Pradesh, India
关键词
Ferroelectrics; Chemical solution deposition; La -doped HfO 2; Tellurium; Steep slope; Phototransistors; THIN-FILMS; HAFNIUM OXIDE; TRANSISTORS; FUTURE;
D O I
10.1016/j.jallcom.2023.172082
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Chemical solution deposition (CSD) is proven viable, low-cost technique for growing thin films of various functional materials. This technique is also employed in the growth of doped-HfO2, aimed at comprehending the effectiveness of dopants in inducing ferroelectricity in HfO2; various dopants such as Zr, Y, Al, Ce, Ba have been investigated over the years. Herein, we now aim to extend the efficacy of CSD in achieving high ferroelectric output in La-doped HfO2 (HLO) directly on silicon. CSD-HLOs exhibit a remarkable remanent polarization (2Pr) of approximate to 37 mu C/cm2 and coercive field (Ec) of - 3 MV/cm. These CSD-HLOs when stacked with HfO2 dielectric and tellurium (Te) p-type semiconducting channel, the resulting field effect transistors (FETs) have not only demonstrated four-fold improvement in the switching characteristics but also substitutionally reduced the leakage currents. The FETs on passivation with Al2O3 demonstrated excellent stability against applied stress and these passivated FETs presented good optical response under blue light through the photogating.
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页数:6
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