Multiple Fano resonances driven by bound states in the continuum in an all-dielectric nanoarrays system

Fano resonance with high Q-factor can greatly enhance the light-matter interaction in all-dielectric metasurface, which is an important condition for developing high-performance micro-/nano-photonics devices. In this paper, we present an all-dielectric metasurface structure composed of nanoarrays to investigate the properties of BIC realization and Fano resonance in the near-infrared spectral region. Four Fano profiles are generated, and two quasi-BIC resonance modes excited by MD appear when the structural symmetry is broken. All the Fano resonances modulation depth close to 100%. The spectral response of the proposed structure is also highly tunable by adjusting the polarization of the incident light and the geometric parameters of the structure. This work may provide a reference for the design of devices, such as biochemical sensing, optical switches, and optical modulators.