[1] North Univ China, Sch Instrument & Elect, Taiyuan 030051, Peoples R China
[2] North Univ China, Sch Instrument & Intelligent Future Technol, Taiyuan 030051, Peoples R China
[3] North Univ China, Acad Adv Interdisciplinary Res, Taiyuan 030051, Peoples R China
[4] North Univ China, Ctr Microsyst Intergrat, Taiyuan 030051, Peoples R China
[5] North Univ China, Sch Semicond & Phys, Taiyuan 030051, Peoples R China
[6] North Univ China, Key Lab Dynam Measurement Technol, Taiyuan 030051, Peoples R China