ELECTRON EMISSION CHARACTERISTICS OF FIELD EMITTER ARRAYS COATED WITH OVER-STOICHIOMETRIC HAFNIUM NITRIDE

被引：0
|
作者：
Osumi, Tomoaki [1 ,2 ]
Hori, Ryosuke [1 ]
Nagao, Masayoshi [2 ]
Murata, Hiromasa [2 ]
Gotoh, Yasuhito [1 ]
机构：
[1] Kyoto Univ, Dept Elect Sci & Engn, Kyoto, Japan
[2] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki, Japan
来源：
2023 IEEE 36TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE, IVNC | 2023年
关键词：
field emitter array; hafnium nitride; nitrogen composition;
D O I：
10.1109/IVNC57695.2023.10189004
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Field emitter arrays (FEAs) were fabricated with over-stoichiometric hafnium nitride (HfN1+x) thin films. Nitrogen compositions and oxygen impurities of the thin films were evaluated by backscattering spectrometry, and crystal structures by X-ray diffraction. Electron emission characteristics of the FEAs with HfN1+x were compared with those of FEAs with stoichiometric HfN. The emission currents of the FEAs with HfN1+x were lower than those of the FEAs with HfN at the same voltage. Emission currents of both FEAs showed gradual decrease in continuous emission test after 15 hours
引用
收藏
页码：172 / 173
页数：2
相关论文
共 50 条
  • [41] Improvement of electron emission of silicon field emitter arrays by pulsed laser cleaning
    Yavas, O
    Suzuki, N
    Takai, M
    Hosono, A
    Okuda, S
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (02): : 1081 - 1084
  • [42] Field emission properties of Mo-coated Si field emitter arrays and formation of molybdenum silicide
    Ju, BK
    Park, HW
    Lee, YH
    Chung, IJ
    Haskard, MR
    Park, JH
    Oh, MH
    IVMC '96 - 9TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE, TECHNICAL DIGEST, 1996, : 221 - 225
  • [43] Effect of gases on the field emission properties of ultrananocrystalline diamond-coated silicon field emitter arrays
    Hajra, M
    Hunt, CE
    Ding, M
    Auciello, O
    Carlisle, J
    Gruen, DM
    JOURNAL OF APPLIED PHYSICS, 2003, 94 (06) : 4079 - 4083
  • [44] Electron field emission characteristics of graphene/carbon nanotubes hybrid field emitter
    Chen, Leifeng
    He, Hong
    Yu, Hua
    Cao, Yiqi
    Lei, Da
    Menggen, QiQiGe
    Wu, Chaoxing
    Hu, Liqin
    JOURNAL OF ALLOYS AND COMPOUNDS, 2014, 610 : 659 - 664
  • [45] Experimental evaluation of rich oxyfuel combustion characteristics in varying over-stoichiometric conditions
    Kroumian, Cynthia
    Maier, Jorg
    Scheffknecht, Guenter
    FUEL, 2024, 365
  • [46] TEMPERATURE EFFECTS ON GALLIUM NITRIDE FIELD EMITTER ARRAYS
    Bhattacharyar, Ranajoy
    Shih, Pao-Chuan
    Palacios, Tomas
    Browning, Jim
    2023 IEEE 36TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE, IVNC, 2023, : 219 - 220
  • [47] Effects of thermal annealing on emission characteristics and surface properties of field emitter arrays
    Ito, F
    Konuma, K
    Okamoto, A
    Yano, A
    Miyano, S
    JOURNAL OF APPLIED PHYSICS, 1997, 82 (12) : 6267 - 6272
  • [48] Emission characteristics of amorphous silicon field emitter arrays sealed in a vacuum package
    Gamo, H
    Kai, T
    Kanemaru, S
    Toh, J
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (12B): : 7213 - 7216
  • [49] Emission characteristics of Spindt-type field emitter arrays in oxygen ambient
    Gotoh, Y
    Utsumi, K
    Nagao, M
    Tsuji, H
    Ishikawa, J
    Nakatani, T
    Sakashita, T
    Betsui, K
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (02): : 604 - 607
  • [50] Control of emission characteristics of silicon field emitter arrays by an ion implantation technique
    Kanemaru, S
    Hirano, T
    Tanoue, H
    Itoh, J
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (03): : 1885 - 1888
12345