共 50 条
- [1] Polarization aberration analysis in optical lithography systems [J]. OPTICAL MICROLITHOGRAPHY XIX, PTS 1-3, 2006, 6154 : U244 - U254
- [2] Orthogonal polynomials describing polarization aberration for rotationally symmetric optical systems [J]. OPTICS EXPRESS, 2015, 23 (21): : 27911 - 27919
- [3] Chromatic aberration of plane-symmetric optical systems [J]. APPLIED OPTICS, 2019, 58 (02) : 227 - 233
- [4] Experimental analysis of polarization aberration in optical system [J]. Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2010, 39 (01): : 124 - 128
- [7] A Review of Skew Aberration, the Intrinsic Polarization Aberration in High NA Optical Systems [J]. INTERNATIONAL OPTICAL DESIGN CONFERENCE 2014, 2014, 9293
- [8] Generalization of aberration theory of plane-symmetric optical systems [J]. Guangxue Jingmi Gongcheng, 2009, 12 (2975-2982):
- [9] Polarization Aberration of a Non-Rotationally Symmetric Optical System With Freeform Surfaces [J]. IEEE ACCESS, 2021, 9 : 145538 - 145553