共 50 条
- [31] Fabrication of surface gratings in GaAs and AlGaAs by electron beam lithography and chemically assisted ion beam etching OPTICAL FABRICATION AND TESTING, 1999, 3739 : 195 - 205
- [35] PROFILE EVOLUTION DURING ION-BEAM ETCHING OF GERMANIUM TARGETS NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY): : 549 - 554
- [36] Reactive ion beam etching of multilayer diffraction gratings with SiO2 as the top layer HOLOGRAPHY AND DIFFRACTIVE OPTICS III, 2008, 6832
- [37] VUV and soft x-ray diffraction gratings fabrication by holographic ion beam etching Holography, Diffractive Optics, and Applications II, Pts 1 and 2, 2005, 5636 : 165 - 175
- [38] New process for Si Nanopyramid Array (NPA) fabrication by ion-beam irradiation and wet etching Koh, Meishoku, 1600, JJAP, Tokyo, Japan (39):
- [39] New process for Si nanopyramid array (NPA) fabrication by ion-beam irradiation and wet etching JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (4B): : 2186 - 2188
- [40] Computer simulation of ion beam etching process in fabricating refractive microlens Weixi Jiagong Jishu/Microfabrication Technology, 2000, (02): : 34 - 38