Synthesis and characterization of anatase phase TiO2 thin films for formaldehyde detection

被引:5
|
作者
Rajkumar, D. [1 ]
Umamahesvari, H. [2 ]
Nagaraju, P. [3 ]
机构
[1] Jawaharlal Nehru Technol Univ Anantapur, Anantapur 515002, India
[2] Sreenivasa Inst Technol & Management Studies, Chittoor 517127, Andhra Pradesh, India
[3] Sreenidhi Inst Sci & Technol, Dept Phys, Hyderabad 501301, Telangana, India
关键词
GAS-SENSING PROPERTIES; PRECURSOR CONCENTRATION; SELECTIVE DETECTION; SENSORS; TEMPERATURE; SIZE;
D O I
10.1007/s10854-023-11730-x
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Volatile organic compounds (VOCs) impact economics, environment, and climate. Room temperature sensors excel with low power consumption, durability, and integration. Detecting VOCs at elevated temperatures using present materials, calibration, and design challenges requires further research. Detecting VOCs at room temperature is crucial for safety and energy efficiency. TiO2 thin films, known for their structural, morphological, and optical properties, have been investigated for gas sensor applications. In this study, TiO2 films were deposited using a chemical spray pyrolysis method at 400 degrees C with varying solution concentrations (0.2 to 0.5 M) of titanium (IV) isopropoxide, acetylacetone, and methanol. The fabricated sensor at 0.4 M showed remarkable selectivity towards formaldehyde among the tested gases. XRD, UV-Vis. Spectroscopy, Raman spectroscopy, AFM, FESEM, and EDX measurements will provide comprehensive characteristics of the fabricated sensor elements. This research highlights the potential of TiO2 thin films as chemo-resistant gas sensors, notably for detecting formaldehyde at room temperature. Substantially reducing the detection limit to 1 ppm while maintaining consistent repeatability in all cycles of measurements is an impressive accomplishment in existing research.
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页数:17
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